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《Journal of Synthetic Crystals》 2006-01
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Study on the Chemical Mechanical Polishing of Large Diameter Lithium Niobate Wafer

WANG Zhan-yin,KONG Yong-fa,CHEN Shao-lin,XU Jing-jun(Key Laboratory of Advanced Technique and Fabrication for Weak-light Nonlinear Photonics Materials,Ministry of Education,Nankai University,Tianjin 300457,China)  
Large diameter lithium niobate wafers(76mm) were polished with chemical mechanical polishing method and SiO_2 Sol as polishing liquid.The influence factors in this polishing process were discussed.The roughness Ra of Z-cut wafer(76mm) reaches(0.387)nm and the flatness is less than 4μm through optimizing technical parameters.
【CateGory Index】: O786
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