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《Journal of Synthetic Crystals》 2009-01
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Analysis on Surface Morphology and Defect Generation at the Initial Stages of 6H-SiC Sublimation Growth

WANG Ying-min,NING Li-na,PENG Yan,XU Hua-yong,HU Xiao-bo,XU Xian-gang(State Key Laboratory of Crystal Materials,Shandong University,Jinan 250100,China)  
The surface morphology and defects generation at the initial stage of 6H-SiC crystals growth had been studied by optical microscopy,high resolution X-ray diffractometry(HRXRD).The whole surface can be divided into flat,slope and hill-valley regions according to the morphology.It could be confirmed that the defects such as micropipes,low angle grain boundaries,and polytype inclusions were induced at the slope region and "hill-valley" region whereas the quality of flat region was better than those at the other two regions.It is deduced the cause for the formation of the "hill-valley" appearance in terms of the thermal field distribution and the seed attachment.In the longitudinal cut sample,these defects which originated from the slope and hill-valley region continue to extend following the crystal growth.Based on the experimental observation,a method for the improvement of crystal quality in terms of the optimal thermal field distribution and seed attachment was proposed.
【Fund】: 国家“863”计划项目(No.2007AA03Z405);; 山东省自然科学基金项目(No.Y2006F15);; 国家自然科学基金项目(No.50721002)
【CateGory Index】: O771
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【References】
Chinese Journal Full-text Database 3 Hits
1 PENG Yan1,NING Li-na1,2,GAO Yu-qiang1,XU Hua-yong1,SONG Sheng1,JIANG Kai1,HU Xiao-bo1,XU Xian-gang1(1.State Key Laboratory of Crystal Materials,Shandong University,Jinan 250100,China;2.Jiaxing College,Jiaxing 314000,China);Study on Surface Morphology and Polytype Transition of 4H-SiC Single Crystals[J];Journal of Synthetic Crystals;2010-03
2 WANG Jia-nuo1,2,YUE Yin-chao1,LI Xiao-mao1,2,ZHANG Jian-xiu1,HU Zhang-gui1,HUANG Wan-xia3(1.Key Laboratory of Functional Crystals and Laser Technology,BCCRD,Technical Institute of Physics and Chemistry,Chinese Academy of Science,Beijing 100049,China;2.Graduate University of Chinese Academy of Sciences,Beijing 100049,China;3.Beijing Synchrotron Radiation Laboratory,Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China);Study on Growth and Defects of Nonlinear Optical Crystal BaAlBO_3F_2[J];Journal of Synthetic Crystals;2011-02
3 SHI Yonggui,DAI Peiyun,YANG Jianfeng,LIU Guangliang (State Key Laboratory for Mechanical Behavior of Materials,Xi′an Jiaotong University,Xi′an 710049,China);Thermal Stress Analysis of Crystal Morphology in Growth of Silicon Carbide Bulk Crystal by PVT Method[J];Journal of Xi'an Jiaotong University;2011-01
【Citations】
Chinese Journal Full-text Database 1 Hits
1 DONG Jie, LIU Zhe, XU Xian-gang, HU Xiao-bo, LI Juan, WANG Li, LI Xian-xiang WANG Ji-yang (State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China);Investigation on the Thermodynamics and Kinetics of the Growth of SiC Single Crystal[J];Journal of Synthetic Crystals;2004-03
【Co-citations】
Chinese Journal Full-text Database 3 Hits
1 Cheng Ping,Zhang Yuming,Zhang Yimen,and Guo Hui (Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices,School of Microelectronics,Xidian University,Xi'an 710071,China);ESR characters of intrinsic defects in epitaxial semi-insulating 4H-SiC illuminated by Xe light[J];Journal of Semiconductors;2009-12
2 Cheng Ping Zhang Yu-Ming Guo Hui Zhang Yi-Men Liao Yu-Long(Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices,School of Microelectronics,Xidian University,Xi'an 710071,China);ESR characteristics of high-quality semi-insulating 4H-SiC crystal prepared by LPCVD[J];Acta Physica Sinica;2009-06
3 Cheng Ping Zhang Yu-Ming Zhang Yi-Men Wang Yue-Hu Guo Hui (Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices,School of Microelectronics,Xidian University,Xi'an 710071,China);Stability of the intrinsic defects in unintentionally doped 4H-SiC epitaxial layer[J];Acta Physica Sinica;2010-05
China Proceedings of conference Full-text Database 1 Hits
1 WANG Li, HU Xiao-bo, DONG Jie, LI Juan, JIANG Shou-zhen, LI Xian-xiang, XU Xian-gang, WANG Ji-yang, JIANG Min-hua (State Key Laboratory of Crystal Materials, Shandong University, Ji'nan 250100, China);Polytypes identification of SiC crystal by micro-raman spectroscopy[A];[C];2004
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 WANG Ji-hui, XIA Yang, WANG Mao-fan (College of Materials Science and Engineering, Tianjin University, Tianjin 300072, China);Preparation and properties of aluminum coating electroplated by inorganic molten salts[J];Ordnance Material Science and Engineering;2005-06
2 Cheng Jianhua (Zheng Zhou Light Metal Research Institute);Aluminum Electrodeposition in Low Temperature Melten Salt System[J];Surface Technology;1994-04
3 Deng Zhi Ping, et al;Eletolytic Alumininzing of Superalloys in Fused Salt Bath[J];Materials Protection;1988-05
4 Wu Chunsu;Progress in Eiectrodepositing Metals from Fused Salt Systems[J];Materials Protection;1990-Z1
5 FENG Qiu-yuan~1, DING Zhi-min~1, JIA Li-shan~2,GUAN Jun-shi~1 (1. Department of Materials Science and Engineering, Dalian Railway University, Dalian 116028; 2. Beijing Feb. 7th Rolling Stock Works. Beijing 100072. China).;Low Temperature Electroplating Aluminum in Molten Salt[J];Materials Protection;2004-04
6 Du Min;Wei Xujun(Northestern University);The Electrodeposition of Al from Ether Electrolytes[J];MATERIAL SCIENCE AND TECHNOLOGY;1996-01
7 LIU Zhe,XU Xiang-gang (State Key Lab.of Crystal Material,Shandong University,Jinan 250100,China);Growth of Bulk SiC[J];Journal of Materials Science and Engineering;2003-02
8 Li Qingfeng and Qin Zhuhan(Northeastern University,Shenyang 110006)N.J.Bjerrum(Chemical Department A,Technical University of Denmark Copenhagen Denmark);Electrochemical Deposition of Aluminium from NaCl-AlCl_3 Molten Salt System[J];RARE METAL MATERIALS AND ENGINEERING;1995-03
9 ;Study on the Performance of Formate Electroplating Solution[J];;1997-05
10 FENG Qiu-yuan, DING Zhi-min (Dalian Railway Institute, Dalian 116028);Progress in the Research on Electroplating of Aluminium in Molten Salts[J];Electroplating & Pollution Control;2003-05
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