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《Journal of Synthetic Crystals》 2009-01
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Effect of Oxygen Partial Pressure on the Structure and Mechanical Properties of HfO_xN_y Thin Films

LIU Wei,SU Xiao-ping,ZHANG Shu-yu,YAN Lan-qin,WANG Hong-bin,LIU Jia-he(Beijing Guojing Infrared Optical Technology Co.,Ltd,General Research Institute for Nonferrous Metals,Beijing 100088,China)  
HfOxNy thin films were deposited by RF reactive magnetron sputtering on multi-spectral ZnS substrates at different oxygen partial pressure.The depositions were carried out under an oxygen-nitrogen-argon atmosphere.Crystalline structure and microstructure of HfOxNy thin films were studied with X-ray diffraction(XRD) and scanning electron microscope(SEM).The hardness and modulus were tested by MTS Nano Indenter XP system.The results indicate that with the oxygen partial pressure decreased,the deposition rate increased obviously,the crystalline structure changed from hafnium dioxide to hafnium oxynitride and hafnium oxynitride phase was formatted in a region of oxygen partial pressure(0.05,0.10,and 0.15).Cross-section of the films observed by SEM revealed that the films grew with a columnar-type structure,and surface observation showed that the films had higher oxygen partial pressure had lower surface roughness.After coated HfOxNy thin films,the hardness and modulus of HfOxNy/ZnS system improved notably.HfOxNy/ZnS system had maximum hardness(11.6 GPa) and modulus(160 GPa) when the oxygen partial pressure at 0.15.
【CateGory Index】: TB383.2
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【Citations】
Chinese Journal Full-text Database 4 Hits
1 MA Zi LU Bai-da (Sichuan University, Chengdu 610064, China.) XIAO Qi DAI Jun (South-West Inst. of Tech. Phys., Chengdu 610041, China.);Observation of optical coatings by atomic force microscope[J];JOURNAL OF CHINESE ELECTRON MICROSCOPY SOCIETY;2000-05
2 LIU Wei,SU Xiao-ping,ZHANG Shu-yu,WANG Hong-bin,HAO Peng(Beijing General Research Institute for Nonferrous Metals,Beijing Guojing Infrared Optical Technology Co.,Ltd,Beijing 100088,China);Preparation and Properties of Hafnium Oxide Protective Films on ZnS Substrates[J];Laser & Infrared;2007-08
3 LIU Wei,SU Xiao-ping,ZHANG Shu-yu,HAO Peng,WANG Hong-bin,LIU Jia-he,YAN Lan-qin(Beijing Guojing Infrared Optical Technology Co.,Ltd,Beijing General Research Institute for Nonferrous Metals,Beijing 100088,China);Effect of Oxygen Partial Pressure on the Structure and Optical Properties of HfO_xN_y Thin Films[J];Laser & Infrared;2007-12
4 Zhang Taihua Yang YeminState Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China;DEVELOPMENTS AND APPLICATIONS OF NANO-HARDNESS TECHNIQUES*[J];Advances In Mechanics;2002-03
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 Liu Meihua~1, Wang Jing~2, Wang Dongai~1 (1. School of Mechanical Engineering, Tianjin Commence University, Tianjin 300134, China; 2.Military Traffic Institute, Tianjin 300161, China);ANALYSIS OF TEST METHODS FOR INDENTATION HARDNESS[J];Engineering Plastics Application;2005-07
2 ;Nanoindentation applying to mechanical measurement for MEMS[J];Micronanoelectronic Technology;2003-Z1
3 ZHANG Hai xia 1,ZHANG Tai Hua 2,HUAN Yong 2 (1.Institute of Microelectronics,Peking University,Beijing100871,China; 2. State Key Lab of Nonlinear Mechanics,Institute of Mechanics,Chinese Academy of Sciences,Beijing100080,China);Nanoindentation and nanoscratch measurements on the mechanical properties of SiO_2 film[J];Micronanoelectronic Technology;2003-Z1
4 YU Yan~1;FEI Ben-hua~2;ZHANG Bo~2;WANG Ge~1.1 International Center for Bamboo and Rattan,Beijing,100102,P.R.China;2 Beijing Institute of Forestry Machinery,Chinese Academy of Forestry,100091, P.R.China.;Longitudinal MOE and hardness of different cell wall layers of softwood tracheids.[J];Journal of Beijing Forestry University;2006-05
5 DONG Shi-yun1, XU Bin-shi2, Beake B D3, Zhu Sheng2, HU Zhen-feng2, WANG Hong-mei1 ( 1. National key laboratory for remanufacturing,Beijing 100072; 2.Department of materials science & engineering, Academy of armored force engineering, Beijng 100072; 3. Micro materials ltd, Wrexham, LL13 7YP, UK );The Measurement of Youngs Modulus of the Electro-brush Plated Nano-Composite Coatings by Nano-indenter[J];China Surface Engineering;2003-04
6 ZHANG Tai-hua1,LIU Dong-xu1,HUAN Yong1,WANG Xiu-lan2 (1.State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing, 100080;2. Beijing Research Institute of Aerospace Materials & Technology, Beijing, 100076);Effects of Different Substrates on Micromechanical and Tribology Properties of TiN Films[J];China Surface Engineering;2003-04
7 LIU Mei-hua 1 , WANG Dong-ai 1 , WANG Jiang2 (1.Tianjin Commerce University, Tianjin 300134, China; 2. Academy of Military Transportation, Tianjin 300161, China);Application of Micro-indentation Techniques in the Fiber Properties Study[J];Packaging Engineering;2005-04
8 HUANG Li-jun,HUANG Xu,CAO Chun-xiao(Beijing Institute of Aeronautical Materials,Beijing 100095,China);Nanoindentation Characteristics of Ti-12Mo-6Zr-2Fe Titanium Alloy[J];Journal of Materials Engineering;2007-03
9 ZHOU Liang,YAO Ying-xue(College of Mechanical and Electrical Engineering,Harbin Institute of Technology,Harbin 150001,China);The Compare between Two Micro-Nanohardness Testing Methods[J];Journal of Test and Measurement Technology;2006-01
10 LANG Feng-chao , XING Yong-ming , ZHU Jing (School of Science, Inner Mongolia University of Technology, Hohhot 010051, China);THE MECHANICAL PROPERTIES OF 316L STAINLESS STEEL AFTER SURFACE NANOSTRUCTURE TREATMENT USING NANOINDENTATION[J];Engineering Mechanics;2008-10
China Proceedings of conference Full-text Database 3 Hits
1 ;羊栖菜多糖(SFPS-B2)的原子力显微镜观察[A];[C];2008
2 DING Jian-ning, XIE Guo-xin (Micro/Nano Science & Technology Center, Jiangsu University, Zhenjiang 212013, China);STUDY OF NANOINDENTION AND FRICTIONAL PROPERTIES ON PHASE CHANGE STORAGE MEDIA[A];[C];2006
3 Wu Yu-feng~1, Ma Sheng-ge~2, Zhou Yi~1, Zhang De-yuan~2, Zhang Yi-chen~1, Geng Man~2 (1. Northeastern University, Shenyang 110004,China; 2. National R&D center for surface engineering of China, Shenzhen,518029,China);Influence of technical parameter on TiN prepared by middle frequency unbalanced magnetron Sputtering[A];[C];2005
【Secondary Citations】
Chinese Journal Full-text Database 5 Hits
1 MA Zi LU Bai-da (Sichuan University, Chengdu 610064, China.) XIAO Qi DAI Jun (South-West Inst. of Tech. Phys., Chengdu 610041, China.);Observation of optical coatings by atomic force microscope[J];JOURNAL OF CHINESE ELECTRON MICROSCOPY SOCIETY;2000-05
2 ZHONS QIN, YUAN YOUXIN AND LIU SONGHAO (Anhui Institute of Optics and Fine Mechanics, Aaademia Sinica.);Microstructures and optical properties of zirconia films[J];Acta Optica Sinica;1989-02
3 Zhang Guifeng(Department of Materials Science and Engineering, Northwestern Polytechnical University, Xian, 710072);New IR Antireflection and Protective Coationgs[J];INFRARED TECHNOLOGY;1995-05
4 LIU Wei,SU Xiao-ping,ZHANG Shu-yu,WANG Hong-bin,HAO Peng(Beijing General Research Institute for Nonferrous Metals,Beijing Guojing Infrared Optical Technology Co.,Ltd,Beijing 100088,China);Preparation and Properties of Hafnium Oxide Protective Films on ZnS Substrates[J];Laser & Infrared;2007-08
5 He Zhibing~*,Wu Weidong,Xu Hua,Zhang Jicheng and Tang Yongjian (Laser Fusion Research Center,Chinese Academy of Engineering and Physics,China);Influence of O_2/Ar Ratio on Microstructures and Properties of Hafnium Dioxide Films[J];Chinese Journal of Vacuum Science and Technology;2006-02
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