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《Journal of Synthetic Crystals》 2009-01
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Study on the Etch-channel Defects in Crystal Quartz

LI Fa-hui1,2,LI Jian-bao1,HUA Da-chen3,WANG Xiao-gang3(1.Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,China;2.Sinoma Advanced Materials Co.,Beijing 100102,China;3.Bright Crystals Technology Inc.,Beijing 100018,China)  
Etch-channel is related to dislocation in crystal structure of synthetic quartz.Etch-channel affects fabrication procedure of quartz.At the same time,because quartz devices usually undertake physical impact,vibration,thermal impact,and radiation,etch-channel impairs their performance.In this paper,the mechanism of etch-channel is analyzed.Some technical measurements to restrict the formation of etch-channel are put forwarded.
【CateGory Index】: O77
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