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《Journal of Synthetic Crystals》 2009-01
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Finite Element Simulation of the Temperature Fields during Super-high Speed Polishing of Diamond Films

ZHOU Li,HUANG Shu-tao,XU Li-fu,JIAO Ke-ru(School of Mechanical Engineering,Shenyang Ligong University,Shenyang 110168,China)  
Super-high speed polishing of diamond films is a new polishing method,the temperature filed of polishing region affects the polishing quality of diamond films directly.A three-dimensional thermo-mechanical coupled finite element(FE) analysis was employed to analyze the temperature field due to the friction between the polishing plate and the thick diamond films with different diameter,while the polishing plate rotating at super high speed.The results indicate that the temperature difference of inner and outer boundary evidently increases with the increase of the diamond films diameter.When the diamond films and polishing plate rotate relatively in-phase,the temperature of inner and outer boundary of diamond films will become uniformity.The results will provide a theoretical guidance to the design and operation of the super-high speed polishing of diamond films.
【Fund】: 国家自然科学基金资助项目(No.50675142)
【CateGory Index】: TB383.2
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