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《Journal of Synthetic Crystals》 2018-01
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Theoretical Analysis for Fabrication of Two-dimensional Photonic Crystals by Dual-beam Holographic Lithography Method

CHEN Zhan-lin;XIONG Yu-qing;School of Materials Science and Engineering,North Minzu University;Key Laboratory of Science and Technology on Surface Engineering,Lanzhou Institute of Physics;  
The interference patterns were simulated by calculating the intensity spatial distribution,which interfered by multi-step dual-beam holographic lithography method. The influences of rotation precision of template plane,the polarization states of incidence beams and the light intensity threshold were studied in theory. The result of investigation indicated that the relationship between the polarization states of beams and the clarity of the interference patterns provided the optimal solution on holographic lithography method. This improves the fabrication of sub-micrometer periodic structure much more efficiently in both theoretical and experimental.
【Fund】: 北方民族大学重点项目(2015KJ21)
【CateGory Index】: O734
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