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《Journal of Shanghai Jiaotong University》 2014-10
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Preventive Maintenance Policy of Cluster Tools Based on Markov Process

QI Fa-qun;ZHOU Bing-hai;School of Mechanical Engineering,Tongji University;  
In order to ensure the reliability of cluster tools in semiconductor wafer fabrications,a Markov process-based preventive maintenance policy was presented considering the economical efficiency.First,a state transfer model was established by applying the method of combining major maintenance and minimal maintenance,taking into account the random failure and degradation failure modes.Then,the steady-state probability for each state and transition probabilities among states were calculated based on the Markov theory.After that,the optimal maintenance policy was obtained through the policy iteration algorithm and the Markov decision theory.Finally,numerous experiments were conducted.The results indicate that the proposed preventive maintenance policy is effective and feasible.
【Fund】: 国家自然科学基金资助项目(61273035;71071115)
【CateGory Index】: O211.62
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【Citations】
Chinese Journal Full-text Database 1 Hits
1 ZHOU Bing-hai,HE Ping,PAN Er-shun,XI Li-feng(School of Mechanical Engineering,Shanghai Jiaotong University,Shanghai 200240,China);Preventive Maintenance Modeling of Cluster Tools for Fabrication Wafers Based on Markov Chain[J];Journal of Shanghai Jiaotong University;2008-10
【Co-citations】
Chinese Journal Full-text Database 7 Hits
1 QI Xin;ZUO Decheng;ZHANG Zhan;YANG Xiaozong;School of Computer Science and Technology,Harbin Institute of Technology;;A Survey on Maintenance Policies of Multi-state System with Multiple Components[J];Intelligent Computer and Applications;2013-05
2 SUN Zhi-li;WANG Jian;YIN Ming-ang;YANG Qiang;School of Mechanical Engineering & Automation, Northeastern University;;Determination About Preventive Maintenance Time of the Repairable System[J];Journal of Northeastern University(Natural Science);2014-01
3 LI Ling;CHENG Guo-qing;LIU Bingxiang;School of Information Engineering,Jingdezhen Ceramic Institute;;Accelerated deteriorating system model based on Gamma process and its optimal condition-based maintenance policy[J];Computer Integrated Manufacturing Systems;2013-11
4 LI Yan;ZHANG Zili;YUAN Hongli;ZHANG Yang;Department of Information Engineering,Ordnance Engineering College;Department of Computer,Shijiazhuang College;;Fault analysis of multi-state deteriorating systems based on RPN and multi-granularity linguistic system[J];Hebei Journal of Industrial Science and Technology;2014-02
5 Li Dawei;Zhang Zhihua;Zhong Qianghui;Zhai Yali;Department of Weapon Engineering,Naval University of Engineering;Office of Research & Development,Naval University of Engineering;Department of Equipment Economics & Management,Naval University of Engineering;College of Science,Naval University of Engineering;;Performance deterioration modeling and optimal preventive maintenance strategy under scheduled servicing subject to mission time[J];中国航空学报(英文版);2014-04
6 ZHONG Jian-lan;MA Yi-zhong;School of Economics and Management,Nanjing University of Science and Technology;;Integrated optimization for SPC and maintenance strategy of two-stage series repairable systems oriented to short-run production[J];Computer Integrated Manufacturing Systems;2014-08
7 TAO Hong-yu;ZHOU Bing-hai;School of Mechanical Engineering,Tongji University;;Opportunistic Maintenance Model for Series Production Systems Based on Stochastic Degradations[J];Journal of Shanghai Jiaotong University;2013-12
China Proceedings of conference Full-text Database 1 Hits
1 Wang Zhixia, He Xu, Meng Yanxing, Xu Houbao Mathematical college,Beijing Institute of Technology, Beijing 100081, P. R. China;Steady availability optimisation of repairable system with preventive maintenance policy[A];[C];2013
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