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《Journal of Shantou University(Natural Science Edition)》 2002-01
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Effects of the Oxidation Layer Upon theMicrostructure of Au Thin Film

Yu Bo Shi Wangzhou (Department of Physics,Shantou University,Shantou,515063)  
In this paper the effects of the oxidation layer upon the microstructure of Au-As thin film deposited on Si is investigated by means of X-ray diffraction and SEM.It has been found that the oxidation layer exerts influence upon the growth rate,grain size and interfacial structure of the thin film on the one hand,and prevents both the interfacial diffusion of Au-As interface and the formation of Si-Au alloy phase on the other hand.
【CateGory Index】: TN304.055
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