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PREPARATION METHODS OF AMORPHOUS HYDROGENATED CARBON THIN FILMS

Zhao Ying  
Recently,amorphous hydrogenated carb6n (a-C:H)thin films are the focus of the research workers' attention because of their unique properties. The various preparation methods of a-C:H thin films,including plasma deposition,ion beam deposition,sputtering and chemical vapor deposition, were described in detail in this paper.Sone typical preparaticn condi- tions were given in this paper,too. Also,the properties of the resulting films,the relationship between he properties and the preparation conditions,the effects of the content tof hydrogen and oxygen and dopants on the film characteristics were discussed. At last,the applicability of a-C:H thin films is looked into the future.
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