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《Journal of Tianjin Normal University(Natural Science Edition)》 2007-01
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On the Crystal Structure and Properties of TaN Monolithic Coatings Based on Different Targets

ZHANG Xue-hua,CAO Meng,YANG Jin,LIU Tong,LI De-jun(College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300074,China)  
Two kinds of TaN monolithic coatings with TaN and Ta as sputtering targets on monocrystal Si chip were prepared by using FJL560CI2 ultra-high vacuum radio freqency magnetron sputtering chamber.XRD,Nano indenter and profiler were employed to investigate the influence of the TaN target on microstructure,mechanical properties of the coatings.The results showed that TaN coatings based on TaN target had higher nanohardness than the ones based on Ta target.When the work pressure was 0.4 Pa,the highest hardness of TaN coating reached to 35.4 GPa.The coating based on TaN target at this condition possessed more excellent hardness,elastic modulus,fracture resistance than the ones using Ta target.
【Fund】: 国家自然科学基金(50472026);; 天津市应用基础研究重点项目(043801011)
【CateGory Index】: TB383.1
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Chinese Journal Full-text Database 1 Hits
1 JI Xin1,ZHOU Xi-ying2,MI Yi-ming1,YAN Zhi2,ZHANG Chao-min1(1.College of Fundamental Studies,Shanghai University of Engineering Science,Shanghai 201620,China; 2.College of Material Engineering,Shanghai University of Engineering Science,Shanghai 201620,China);Influence of different processes on microstructure and properties of TaN thin film[J];Heat Treatment of Metals;2010-04
Chinese Journal Full-text Database 2 Hits
1 Leng Yongxiang Huang Nan Yang Ping (Dept of Materials Engineering,Southwest Jiaotong University);Research on Synthesis of Taltanlum Nitride Film and Its Structure[J];JOURNAL OF MATERIALS ENGINEERING;1998-09
2 XU Junhua,LI Geyang,GU Mingyuan,JIN Yanping,XIN Tinghui (State Key Lab. of MMCs,Shanghai Jiaotong University,Shanghai,200030,China);The Structures and Properties of the TaN Coatings Deposited by the Reaction Magnetron Sputtering[J];JOURNAL OF FUNCTIONAL MATERIALS;2000-03
Chinese Journal Full-text Database 3 Hits
1 YU Chun-fu~1, XU Jiu-jun~2, HEI Zu-kun~2 (1. Tokyo Institute of Technology Graduate School, 2. Dalian Maritime University, Dalian 116000);IN SITU STUDY OF THE EARLY STAGES OF LOCALIZED CORROSION IN TaN THIN FILM USING ECAFM[J];Corrosion & Protection;2004-03
2 Liu Zonghe~1,Fang Xuebing~1,Liu Bo~1,Ling Weiwei~2 (1.Shen Zhen SI Semiconductors CO.,LTD Shenzhen 518029;2.UESTC Chengdu 610054);Study of Effects on Adhesion of Cr Films Deposited by D.C Magnetron Sputtering[J];Experiment Science & Technology;2006-01
3 CHEN Hong-xia XU Xiu-lian ZENG Xiang-hua CHEN Yun-hong(Dept of Phys, Coll of Sci, Complexity Sci Cen, Yangzhou Univ, Yangzhou, 225002, China);MAGNETORESISTANCE OF Fe-N FILM PREPARED BY REACTIVE MAGNETRON SPUTTERING[J];Journal of Yangzhou Univensity Nataral Science Edition;2002-01
Chinese Journal Full-text Database 1 Hits
1 HUANG Yong-gang~1,CHEN Min~2,LI Chang-min~2,ZHANG Qing-yu~3,HUANG Ying~1(1.Institute of Special Glass Fiber & Photoelectric Functional Materials,China Building Materials Academy,Beijing 100024,China;2.Department of Materials Science and Engineering,Dalian Institute of Light Industry,Dalian 116034,China;3.State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams & Department of Physics,Dalian University of Technology,Dalian 116024,China);Influence of Substrate Temperature on Surface Morphology and Properties of Titanium Oxide Thin Films[J];Journal of Materials Science and Engineering;2006-03
【Secondary Citations】
Chinese Journal Full-text Database 3 Hits
1 Han Shunchang (Luoyang Ship Material Research Institute);Structure, Behavior and Characterization of Nanostructured Material[J];DEVELOPMENT AND APPLICATION OF MATERIALS;1998-01
2 LU Ke; LIU Xuedong; HU Zhuangqi (National Key Laboratory for RSA, Institute of Metal Reseurch, Academia Sinica);THE HALL-PETCH RELATION IN NANOCRYSTALLINE MATERIALS[J];CHINESE JOURNAL OF MATERIAL RESEARCH;1994-05
3 Xu Min-sheng, Chen Guo-ping(Nanjing Institute of Technology)Wang Hua-qin(Nanjing University);EFFECTS OF NITROGEN PARTIAL PRESSURE ON THE STRUCTURE AND PROPTY OF TANTALUM NITRIDE FILM[J];Vacuum Science and Technology;1987-01
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