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《Journal of Tianjin Normal University(Natural Science Edition)》 2014-01
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Influence of nitrogen flows on properties of TiAlN films prepared by hybrid ion plating

XUE Li;HUANG Meidong;CHENG Fang;LIU Ye;XU Shipeng;LI Yunke;College of Physics and Materials Science,Tianjin Normal University;  
TiAlN thin films were prepared by hybrid ion plating, consisting of arc ion plating and magnetron sputtering,with different nitrogen flows at-300 V bias. Deposition rate,crystal structure,surface morphology,hardness and modulus of the films were tested and analyzed by XP-2 profiler,X-ray diffraction(XRD),scanning electron microscopy(SEM),nanoindenter,respectively. The results showed that the surface morphology of the films became better with the increase of nitrogen flows. The hardness and modulus of the films increased at first and then decreased with the increase of nitrogen flows.
【Fund】: 国家自然科学基金资助项目(61078059);; 天津师范大学创新计划资助项目(52X09038)
【CateGory Index】: TQ153
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