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Preparation of SiO_2 Thin Films on Microscope Slides by Sol-gel Process

Zhang Zhibo Wang Lijiu (Dalian University of Technology,116024)Noriyoshi KAKUTA Akifumi UENO (Toyohashi University of Technology,Japan)  
The silica films were prepared by a new Sol-gel process from tetraethylorthosilicate(TEOS)solutions.In the present study,the solutions containg different H_2O/Si(OC_2H_5)_4 molar ratioshave been prepared,and as drying control chemical additive(DCCA),appropriate amount ofglycerin was added in these solutions.Microscope slides have been spin coated in these solutions.After backing,the film thickness has been determined.The film microstructure was observedby scanning electron microscope.It was shown that the H_2O/Si(OC_2H_5)_4 molar ratio andglycerin clearly affect the film microstructure.As a result,the solutions of H_2O/Si(OC_2H_5)_4≥15 by the addition of glycerin are good for preparing uniform SiO_2 films.
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