Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《JOURNAL OF INORGANIC MATERIALS》 2000-01
Add to Favorite Get Latest Update

X-ray Photoelectron Spectroscopy Studies of ITO Thin Films

CHEN Meng; PEI Zhi-Liang; BAI Xue-Dong; HUANG Rong-Fang; WEN Li-Shi(Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015, China)  
The chemical states of In, Sn and O in Sn-doped In_2O_3 films were investigated byusing X-ray photoelectron spectroscopy. The results indicate that Sn and In respectively exist ina same chemical state for both as-deposited and post-annealed films. Two types of O~2-ions, O_iand O_II, can be distinguished by Gaussian simulation. O_I has a binding energy of 529.90±0.30 eVwhich is in oxygen sufficient region, and O_II has a binding energy of 531.40±0.2 eV which is inoxygen deficient regions. Oxygen deficient regions mainly exist in the surface layer.
【Fund】: 沈阳市科技攻关项目
【CateGory Index】: O484
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 10 Hits
1 HOU Lun-deng,ZHANG qi-sheng,SU Tuan,LU Ji-sheng College of Wood Science and Technology,Nanjing Forestry University,Nanjing 210037,China;X-ray photoelectron spectroscopy analysis of reconstituted bamboo lumber[J];林业科技开发;2012-01
2 ZHAO Jia-ming1,BIAN Ji-ming1,SUN Jing-chang2,ZHANG Dong1, LIANG Hong-wei1,LUO Ying-min1 (1.School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024,China; 2.School of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,China);Growth and transparent conductive properties of ITO films on flexible polyimide(PI) substrates[J];功能材料;2011-S4
3 Qin Liping1,Gu Yingying2,Liu Xueying1(1.Department of Science and Technology,Guangxi University of Technology,Liuzhou 545006,China;2.School of Chemistry and Chemical Engineering,Central South University,Changsha 410083,China);Effects of Solvothermal Conditions on Electric Performance of ITO Nano-Powders[J];稀有金属;2009-04
4 ZENG Guang-gen,ZHENG Jia-gui,LI Bing,CHEN Qi,WU Li-li,LI Wei,ZHANG Jing-quan,LEI Zhi,CAI Ya-ping,CAI Wei,FENG Liang-huan Department of Materials Science,Sichuan University,Chengdu 610064,China;Spectral Analysis of Effects of Annealing on the Characteristics of Intrinsic SnO_2 Polycrystalline Thin Films[J];光谱学与光谱分析;2008-02
5 GU Yingyinga and QIN Lipinga,ba School of Chemistry and Chemical Engineering,Central South University,Changsha 410083,China b Science and Technology Department,Guangxi University of Technology,Liuzhou 545006,China;Preparation of Sn-doped In_2O_3 nanopowders by a solvothermal process[J];Rare Metals;2008-01
6 YUAN Guangcai XU Zheng~(**) ZHANG Fujun WANG Yong (Institute of Optoelectronics Technology,Beijing Jiaotong University,Key Laboratory of Luminescence and Optical Information,Ministry of Education Beijing 100044);Influence to photoelectric properties of ITO thin film by sputtering condition and RTA processing[J];材料研究学报;2007-03
7 Li Shitao, Qiao Xueliang, Chen Jianguo (State Key Lab of Die & Mould Technology, Huazhong University of Science and Technology, Wuhan 430074, China);Effects of Oxygen Flow on the Photoelectricity Properties of In_2O_3-SnO_2 Films[J];稀有金属材料与工程;2006-01
8 LI Shi-tao, QIAO Xue-liang, CHEN Jian-guo(State Key Laboratory of Die and Mould Technology, Huazhong University of Science and Technology, Wuhan 430074, China);Preparation and analysis of In_2O_3-SnO_2 thin films deposited by magnetic sputtering[J];中国有色金属学报;2005-08
9 SHI Cheng-wu~~(1,2), DAI Song-yuan~1, WANG Kong-jia~1, SUI Yi-feng~1, FANG Xia-qin~1 (1. Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China; 2.School of Chemical Engineering, Hefei University of Technology, Hefei 230009, China);Effect of electron beam irradiation on F-doped SnO_2 conducting glass[J];合肥工业大学学报(自然科学版);2005-03
10 SHI Cheng-wu,DAI Song-yuan,WANG Kong-jia,SUI Yi-feng,FANG Xia-qin(Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China);Nanocrystalline TiO_2 film irradiated by the electron beam and its application to solar cells[J];合肥工业大学学报(自然科学版);2004-10
【Citations】
Chinese Journal Full-text Database 1 Hits
1 Meng CHEN, Xuedong BAI, Jun GONG, Chao SUN, Rongfang HUANG and Lishi WEN (Institute of Metal Research, the Chinese Academy of Sciences, Shenyang 110015, China);Properties of Reactive Magnetron Sputtered ITO Films without in-situ Substrate Heating and Post-deposition Annealing[J];Journal of Materials Science & Technology;2000-03
【Co-citations】
Chinese Journal Full-text Database 2 Hits
1 Zhang Qingqing;Wang Zhaoyong;Cheng Zuhua;Han Changbao;Yao Ning;School of Physical Engineering and Laboratory of Physics of Zhengzhou University,Materials Physics Key Laboratory of the Ministry of Education;School of Mathematics and Physics,Henan Urban Construction University;;Properties and Application of Indium-Tin-Oxide Coatings Deposited by Energy Filtering Magnetron Sputtering at Room Temperature[J];真空科学与技术学报;2015-01
2 CHEN Meng; PEI Zhi-Liang; BAI Xue-Dong; HUANG Rong-Fang; WEN Li-Shi(Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015, China);X-ray Photoelectron Spectroscopy Studies of ITO Thin Films[J];无机材料学报;2000-01
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Lu Yunhua1 Wang Yongfei1 Xiao Guoyong1 Chi Haijun1 Hu Zhizhi1 Li Lun2(1.School of Chemical Engineering,University of Science and Technology Liaoning,Anshan 114044;2.Chemical Engineering Department,Anshan Coking and Refractory Engineering lonsulting Corporation,Anshan 114001);Progress of colorless,transparent and thermal resistant polyimide films[J];化工新型材料;2009-08
2 WANG Sheng-hao,ZHANG Jing-quan,WANG Bo,FENG Liang-huan,CAI Ya-ping,LEI Zhi,LI Bing,WU Li-li,LI Wei,ZENG Guang-gen,ZHENG Jia-gui,CAI Wei(College of Materials Science & Engineering,Sichuan University,Chengdu 610064,China);Influence of dc power and oxygen partial pressure on the electrical and optical properties of indium-tin-oxide films[J];功能材料;2009-05
3 Cheng Lishun1,2,Sun Benshuang2,Zhong Jingming2,He Lijun1,Wang Dongxin2,Chen Huanming1 (1. Ningxia University,Yinchuan 750021,China) (2. Northwest Rare Metal Materials Research Institute,Shizuishan 753000,China);Development of ITO Transparent and Conductive Thin Films[J];稀有金属快报;2008-03
4 ZHONG Zhi-you(College of Electronic Information Engineering,South-Central University for Nationalities,Wuhan 430074,China);Surface modification studies of ITO using atomic force microscopy and X-ray photoelectron spectroscopy[J];功能材料;2007-08
5 YAO Fei-fei,FENG Liang-huan,CHEN Wei-dong,LEI Zhi,ZHANG Jing-quan,LI Wei,WU Li-li,CAI Wei,CAI Ya-ping,ZHENG Jia-gui,LI Bing(Department of Materials Science,Sichuan University,Chengdu 610064,CHN);Properties of SnO_2 Polycrystalline Thin Films Prepared by Magnetic Reactive Sputtering[J];半导体光电;2007-03
6 Sun Yi1, Diao Xungang1, Yang Meng1, Wu Zhe1 , Shu Yuanjie2 (1. Beijing University of Aeronautics and Astronautics, Beijing 100083, China) (2. Institute of Chemical Materials, CAEP, Mianyang, 621900, China);Study on Electrical and Optical Properties of Flexible Transparent Conductive ITO Film[J];稀有金属材料与工程;2007-01
7 Zeng Guang-Gen Zheng Jia-Gui Li Bing Lei Zhi Wu Li-Li Cai Ya-PingLi Wei Zhang Jing-Quan Cai Wei Feng Liang-Huan(College of Materials Science and Engineering,Sichuan University,Chengdu 610064,China);Polycrystalline CdS/CdTe thin-film Solar cells with intrinsic SnO_2 films of high resistance[J];物理学报;2006-09
8 Chen Weidong,Feng Lianghuan~,Lei Zhi,Zhang Jingquan,Wu Lili,Cai Wei,Cai Yaping,Yao Feifei,Li Wei,Li Bing,and Zheng Jiagui(College of Material Science and Engineering,Sichuan University,Chengdu 610064,China);Growth of AlSb Polycrystalline Films by Magnetron Sputtering and Annealing[J];半导体学报;2006-03
9 WANG Lei,DU Jun,MAO Chang-hui,YANG Zhi-ming,XIONG Yu-hua(Research Center of Energy Materials and Engineering,General Research Institute for Nonferrous Metals,Beijing 100088,China);Study on Conductive Property of SnO_2 Thin Film[J];表面技术;2005-05
10 GUO, Jing-Boa TAO, Zong-Yaa LUO, Xue-Gang,b (a College of Life Science, Sichuan Normal University, Chengdu 610066) (b College of Material Science and Engineering, Southwest University of Science and Technology, Mianyang 621010);Analysis of Bamboo Lignin with FTIR and XPS[J];化学学报;2005-16
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 YE You-ming;TAN Cui;ZHAO Ming-yong;YE Fang-jian;Liuzhou China Tin Tin&Indium Material Co.Ltd.;;Effect of Precipitator Adding Method on Properties of ITO Powder[J];化工技术与开发;2015-11
2 LI Shan;YANG Huidong;WANG Wenming;LEI Fei;MIN Wenjun;College of Information Science and Technology,Jinan University;State Key Laboratory of Silicon Materials,Zhejiang University;;Effect of Argon Pressure on Properties of Flexible ZnO∶Al Films[J];材料导报;2014-20
3 L Bao-hua;LI Yu-zhen;HUANG Jian;REN Xiao-juan;Department of Applied Chemistry,Yuncheng University;Electrical and Mechanical Public Experiment Center,Yuncheng University;;Effects of Sn-doping Amounts on Optical Properties and Morphology of In_2O_3 Powders[J];机械工程材料;2015-01
4 Chang Xi;Yang Lining;Qi Haibo;Institute of Materials Science and Engineering,Shijiazhuang Tiedao University;;Surface Uniformity of ITO Thin Films Prepared by Repeatedly Electro-spinning and Annealing[J];石家庄铁道大学学报(自然科学版);2014-02
5 YANG Kun;HU Zhi-qiang;XU Shu-lin;WANG Hai-quan;YU Yang;LIU Gui-shan;JIANG Yan-yan;ZHANG Hai-tao;Institute of New Energy Material,Dalian Polytechnic University;Jin Zhou New Century Quartz(Group)Company Limited;;Preparation and Photoelectric Properties of ITO Films Deposited on PET Substrate[J];材料工程;2014-03
6 MENG Leichao;ZHAO Peng;SU Xinghua;AI Tao;ZHANG Yi;School of Materials Science and Engineering, Chang'An University;;The Preparation of Indium Tin Oxide Nano Powder[J];中国陶瓷;2014-02
7 HAN Huai-jun;CHEN Yi-qing;ZHAO Tian;School of Materials Science and Engineering,Hefei University of Technology;;Preparation and photoelectrochemical property of CdS sensitized TiO_2 anode materials[J];合肥工业大学学报(自然科学版);2013-12
8 XIAO Gui-ying;DUAN Xue-chen;ZHU Yi-yi;DUAN Wen-jie;LIU Yang-lin;School of Materials Science and Engineering,Central South University;The Key Laboratory of Nonferrous Metal Materials Science and Engineering,Ministry of Education of China;;Morphology and electric conductivity of ITO powder synthesized by solvothermal route[J];粉末冶金材料科学与工程;2013-06
9 XU Li;XIU Xian-wu;LI Yu-guo;Shandong College of Electronic and Technology;Shandong Normal University;;The Growth Technology of In_2O_3 Transparent Conductive Oxide Films[J];价值工程;2013-30
10 Zeng Guanggen;Feng Lianghuan;Zhang Jingquan;Li Bing;Wu Lili;Li Wei;Wang Wenwu;College of Materials Science and Engineering,Sichuan University;;UNIFORMITY STUDY OF CdS /CdTe HETERO-JUNCTION SOLAR CELLS WITH UN-DOPED SnO_2[J];太阳能学报;2013-08
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved