Production of Si_3N_4 Ultrafine Powders by Chemical Vapor Deposition
Zhu hongjie; Li Chunzhong; Chen Hong; Hu Liming(Technical Chemical Physics Institute, East China University of Science and Technology Shanghai 200237 China)
The system of SiCl4-NH3-N2-H2, which was used to synthesize Si3N4 ultrafine powders, was analyzed thermodynamically, and the conditions to prepare Si3N4 powders were evaluated. Si3N4 ultrafine powders were synthesised by chemical vapor deposition method in an electronic furnace reactor. The influence of processing parameters on properties of products was studied.