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TCO Film for LCD

Zhong Boqiang; Yu Dawei; Pan Huiying(Shanghai Institute of Ceramics, Chinese Academy of Sciences Shanghai 200050 China)  
Thansmittance Conductive Oxide (TCO) films were deposited by RF sputtering using indium tin chide targets. Low resistivity of 3.5×10-4Ω·cm was obtained under optimum conditions, depending on oxygen partial pressure and substrate temperature. When TCO films are deposited on color filter or protective films, the substrate temperatures have to be controlled below the highest thermal resistance temperature of color filter or protective films, and adhesive gases have to be expeled from colour filter or protective films.
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