A MODIFIED RADIO—FREQUENCY ION SOURCE FOR BOTH GAS AND SOLID
Cheng Shichang Fan Xiangjun Guo Huaixi
This paper describes a modified radio-frenquency ion source used for both gas and solid. To compare this ion source with those old-fashioned ones, the direction of the high frequency coupling inductor relative to the auxiliary magnetic field and the extracting electrode is changed. In the extracting system, on extracting electrode with thin wall on it's top is used and a tube solid vapourizer is placed in the discharge chamber. Ion beams of various elements such as boron and phosphorus have been produced with this modified ion source, and the experimental results show that the performance of this source is improved.