A STUDY ON THE OPTIMUM EXTRACTING CONDITION OF A MODIFIED ION SOURCE
Yang Yezhi Lu Shanshan Cuo Huaixi
The experiment to study a modified radio-freguency ion source used for both gas and solid is described. It is found that the extracted phosphorus ion beam intensity is a function of the temperature of phosphorus being heated to and the pressure of the auxiliary gas At. The optimum operating conditions for extracting phosphorus ion beam are determined. The possible application of these experimental results is discussed.