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《Physics Experimentation》 2001-07
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Ellipsometer data processing for thin film measurement

WANG Hong tao (Department of Materials Science, Sichuan University, Chengdu,610064)  
An integrated software for ellipsometer data processing is introduced. With real time graphic construction, this software successfully solves the difficulties in ellipsometer data processing. It is a helpful tool for research work and educational purpose. With this software, the real thickness of thin films is determined by multiple incident angle measurement.
【CateGory Index】: O484.5
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