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《Physics Experimentation》 2018-10
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Preparation and characterization of optically transparent ferromagnetic thin films under less rigorous conditions

GUO Yi-xin;HU Yong;XIE Ning;WANG Zhong-ping;a.School of Physical Sciences,University of Science and Technology of China;Physics Experiment Teaching Center,University of Science and Technology of China;  
The transparent and strong magnetic material films with better properties were fabricated under the less strict experimental conditions by the technology of double target simultaneous sputtering used to the Fe-Co alloy and fluoride sputtering simultaneously in our experiment.Transparent magnetic thin films grew well shown by the charactering of AFM and SEM,and transparent magnetic thin films were characterized by ultraviolet-visible near-infrared spectrophotometer and magnetization measurement to be of the well transparent and magnetic properties.The difficulty of detecting fluoride signal in XRF characterization was solved by using Fe-Co alloy target doped with fluoride homogeneously.At the initial stage of sputtering,a small amount of N2 was slowly injected to enhance the abrasive resistance of the film.
【CateGory Index】: TB383.2
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