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《JOURNAL OF XI'AN JIAOTONG UNIVERSITY》 1995-01
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DESIGN OF AN ABSOLUTE HIGH VACUUM PRESSURE GAUGE

Zhu Changchun; Wang Haixiao(School of Electronics and Information Engineering)William N. Carr(Microelectronies center,New Jersey Institute of Technology, NJ07102,USA)  
For the first time,this paper presents a new type of vacuum gauge,Absolute High Vac-uum Pressure Gauge (AHVPG),which measures the vacuum degree by counting the numberof gas molecules directly. The AHVPGs with diaphragm anode,simple beam and cantilevercathode were developed , desinged and studied. For comparison, we calculated the deflectionof diapharagm,simple beam and cantilever under the same condition. In addition,we de-rived an important equation on molecular flux.
【Fund】: 国家自然科学基金
【CateGory Index】: TN107
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