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Analysis and design of the digital micromirror device

JIA Jian yuan 1,SHAO Bin 1,FENG Xiao ping 2 (1. School of Mechano electronic Engineering, Xidian Univ., Xi′an 710071, China; 2. School of Electronic Engineering, Xidian Univ., Xi′an 710071, China)  
The projection device based on the DMD and DLP has a prosperous future and potential commercial value. In this paper, the micro mechanical theories of key device DMD and DLP are expounded. The mechanical dynamics model of DMD based on the nanon tech is established. The simplified and practical modeling methods for considering the nanon effect of impact are proposed. By using the numerical emulation method, the motion status and course of a typical DMD element are analyzed. The analysis result coincides with the result measured in practice very well. A new DMD structure is designed with its analysis and design methods described.
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