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Study of the high temperature semiconductor pressure sensor

HAN Xiao liang,ZHU Zuo yun,LI Yue jin (Research Inst. of Microelectronics, Xidian Univ., Xi′an 710071, China)  
The application and the development of high temperature semiconductor pressure sensor are overviewed. Its principle, key techniques, and the characteristics are compared and discussed, with emphasis on the introduction of some new types of SiC high temperature pressure sensor.
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