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《CHINESE JOURNAL OF LIQUID CRYSTALS AND DISPLAYS》 1998-01
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EXPLORATION FOR TECHNOLOGY OF POLY-Si TFT

Zhang Jianjun, Wu Chunya, Li JunfengZhou Zhenhua, Meng Zhiguo, Zhao Ying, Sun Zhonglin(NanKai University Photoelectronic Ins, Optical Information Science Laboratory, Tianjin 300071)  
おhe manufacture process of poly-Si TFT was researched The poly-Si thin film was crystallized from amorphous silicon film by excimer laser Sputtered Mo and evaporated Al were used for two kinds of the source and drain contact, and the characteristics of this two kinds of poly-Si TFTs were compared The effect of annealing for transport characteristic of poly-Si TFT was analyzed, and proved that the property of our poly-Si was accorded with the demands for TFT
【Fund】: 国家自然科学基金
【CateGory Index】: O634.41
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【Co-citations】
Chinese Journal Full-text Database 2 Hits
1 Thin Film & Microelectronics:Meng Zhiguo;Dai Yongping; Zhou Zhenhua; Zhang Jianjun;Yao Lun; Gu Chunzhi; Li Junfeng;Wu Chunya; Xiong ShaozhenDesign & Simulation:Zhao Ying; Wang Lin; Xu WenyuanModule & Application:Yuan Qingpeng;Huang Yu; Li Shushan;Mo Xicha;THE PROGRESS IN PREPARING α-Si TFT-LCD[J];CHINESE JOURNAL OF LIQUID CRYSTALS AND DISPLAYS;1996-04
2 QIAN Xiangzhong1,2,CHENG Jianbo2(1.Anhui University of Science and Technology, Huainan 232001,China;2.University of Electric Science and Technology, Chengdu 610054,China);EFFECT OF SWITCH STRUCTURE ON THE OPTICAL PROPERTIES OF a-SiTFT-LCD[J];Journal of Applied Optics;2003-01
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