Research on Three-dimensional Profiler for Super-smooth Surtace
Wang Yuanqing (Machinery - Electric Institute of Anhui,Wuhu 241000)
By laser interference and electrical common - mode rejection and by the two - dimension scanning and computer,the profile of a super -smooth surface can be detected three dimensionally and non - destructively with vertical resolution better than 0. 1 nano - meter and lateral resolution better than 2μm. In this paper,the principle,structure and error analysis about the profiler is given. The three dimensional profile is elso discussed.
【CateGory Index】： TN24