Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Applied Laser》 2007-01
Add to Favorite Get Latest Update

Analysis of the Structure of Laser Crystallized amorphous Silicon Thin Film

Pang Hongjie1,Wang Cunshan1,Zhang Kaishu1,Su Yuanjun1,Pei Jibin2(1.DaLian University of Technology DaLian,Liaoning 116024,2.School of Materials Science andEngineering,Dalian University of Technology,Dalian Liaoning,116024,China)  
The amorphous silicon(a-Si) thin films,as a precursor,were deposited by RF(13.56 MHz) magnetron sputtering system on quartz glasses,and then the phase transition from a-Si to nano-Si was performed by laser crystallization.The effect of laser power on the microstructure of the films was investigated by means of Raman spectrometer and HRTEM.The results indicate that the amorphous film gradually transfers into microcrystalline Si,and the grain size is nanometer order of magnitude.Moreover,there is a optimal laser power for the crystallization between 80W~100W.
【CateGory Index】: TN244
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 6 Hits
1 Cheng Long;Hao Huilian;Liu Jianyu;Ma Yongpin;Ding Wei;School of Materials Engineering,Shanghai University of Engineering Science;;Structure Study of Amorphous Silicon Thin Films Crystallized with the Continuous Laser[J];微纳电子技术;2015-08
2 WANG Qiang;GU Jiang;HUA Guo-ran;School of Physics,Soochow University;School of Electronics and Information,Nantong University;School of Physics and Electronic Engineering,Changshu Institute of Technology;School of Mechanical Engineering,Nantong University;;A low damage laser annealing process for amorphous silicon thin films with an antireflective film[J];功能材料;2014-12
3 Hu Juguang;Tang Huabin;Li Qiwen;Li Xuejin;Zheng Bin;Liu Yi;Long Jinghua;Lin Xiaodong;College of Physical Science and Technology,Shenzhen University;Shenzhen Key Lab of Sensors Technology;;Study on the structure of crystallized CIGS thin films by near infrared laser annealing[J];深圳大学学报(理工版);2013-06
4 LAI Jianjun,DUAN Chunyan,AI Bin,ZENG Xueran,DENG Youjun,LIU Chao,SHEN Hui(Institute for Solar Energy Systems,State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University,Guangzhou 510006,China);Study on the Laser Crystallization of Amorphous Silicon Thin Films with a 355 nm YAG Picosecond Pulsed Laser[J];中山大学学报(自然科学版);2012-03
5 DUAN Guo-ping,CHEN Jun-ling,HAN Jun-he,HUANG Ming-ju(Open Laboratory of Key Subject of Photo-electronics Information Material and Devices of Henan Province; School of Physics and Electronics,Henan University,Kaifeng,Henan 475004,China);Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuous-wave Laser[J];光子学报;2011-11
6 XU Er-ming1,Yuan Chao2,WANG Jun-ping1,HUO Hao-lei1,LIANG Er-jun1 (1.School of Physics and Engineering,Zhengzhou University,Zhengzhou 450052,China; 2.School of Sciences,Henan University of Agriculture,Zhengzhou 450002,China);In-situ Raman Spectroscopic Study on the Crystallization of Amorphous Silicon Thin Films with a 532nm Continuous-wave Laser[J];光散射学报;2008-03
【Citations】
Chinese Journal Full-text Database 1 Hits
1 CHEN Sui-yuan,LIU Chang-sheng,CAI Qing-kui,MA Li-xia,TUO Jing-hong (School of Materials and Metallurgy,Northeastern University,Shenyang 110004,China);Study on the preparation of Fe-based nanocrystalline soft magnetic materials[J];激光技术;2005-01
【Co-citations】
Chinese Journal Full-text Database 4 Hits
1 Zhang Hua,Hua Guoran,Chen Hong(School of Mechanical Engineering,Nantong University,Nantong,Jiangsu 226019,China);Research of Grain Growth in YAG Laser Microcrystallized Amorphous Silicon Thin Film[J];应用激光;2012-05
2 ZHENG Meng-meng1,2,WU Fu-quan1,LIU Zai-guo2,ZHANG Li-chun2,LI Qing-shan2,TIAN Jian-xiang2(1.Institute of Laser Research,Qufu Normal University,Qufu 273165,China;2.College of Physics and Engineering,Qufu Normal University,Qufu 273165,China);Optical polarization property of porous anodic alumina template[J];激光技术;2008-02
3 Pang Hongjie1,Wang Cunshan1,Zhang Kaishu1,Su Yuanjun1,Pei Jibin2(1.DaLian University of Technology DaLian,Liaoning 116024,2.School of Materials Science andEngineering,Dalian University of Technology,Dalian Liaoning,116024,China);Analysis of the Structure of Laser Crystallized amorphous Silicon Thin Film[J];应用激光;2007-01
4 LUO Jun,ZHU Zheng-hou,LIU Yong(School of Materials Science and Engineering,Nanchang University,Nanchang 330047,China);Preparation of Fe_(73.5)Cu_1Nb_3Si_(13.5)B_9 nanocrystalline bulk by laser-remelting[J];激光技术;2005-06
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Zhang Yike;Hao Huilian;Wu Zhaokun;Yu Xiaoyang;School of Materials Engineering,Shanghai University of Engineering Science;;Effect of the Hydrogen Dilution on the Film Structure and Photoluminescence of nc-Si∶H Thin Films[J];微纳电子技术;2014-11
2 ZHOU De-rang,DUANG Guo-ping,CHEN Jun-ling,HAN Jun-he,HUANG Ming-ju(Open Laboratory of Key Subject of Photoelectric Information Material of Henan Province,School of Physics and Electron,Henan University,Kaifeng 475004,China);Study about continuous Ar~+Kr~+ laser crystallization of amorphous silicon thin film[J];激光技术;2013-05
3 DUAN Liang-fei1,2,ZHANG Li-yuan1,2,YANG Pei-zhi1,2, HUA Qi-lin1,2,DENG Shuan1,2,LIAO Hua1,2(1.Key Laboratory of Renewable Energy Advanced Materials and Manufacturing Technology of Ministry of Education of China,Kunming 650092,China; 2.Solar Energy Research Institute,Yunnan Normal University,Kunming 650092,China);Study on the Preparation and Crystallization of Amorphous Silicon Film[J];云南师范大学学报(自然科学版);2013-02
4 Hu Juguang1,2,Li Qiwen1,Zheng Bin1,Tang Huabin1,Wang Pei1, Luo Zhongkuan3,Cao Huiqun3,Lin Xiaodong1,2(1.The College of Physics Science and Technology,Shenzhen University,Shenzhen 518060,China; 2.Shenzhen Key Lab of Sensors Technology,Shenzhen 518060,China; 3.School of Chemistry and Chemical Engineering,Shenzhen University,Shenzhen 518060,China);TEMPERATURE DEPENDENCE OF PROPERTIES OF CdS、ZnS FILMS PREPARED BY PLD METHOD[J];太阳能学报;2013-01
5 HE Jia,QIU Hai-ning (College of Materials Engineering,Shanghai University of Engineering Science,Shanghai 201620,China);Effect of Excitation Frequencies on Crystalline Properties of Nanocrystalline Silicon Thin Films[J];实验室研究与探索;2012-12
6 FAN Ping,CHI Jing-rong,LIANG Guang-xing,ZHENG Zhuang-hao, ZHANG Dong-ping,CAI Xing-min,LI ding-mei,and CHEN Tian-bao College of Physical Science and Technology,Institute of Thin Film Physics and Applications,Shenzhen Key Laboratory of Sensor Technology,Shenzhen University,Shenzhen 518060,P.R.China;Preparation and characterization of CIGS thin films by depositing quaternary layers[J];深圳大学学报(理工版);2012-02
7 DUAN Guo-ping,CHEN Jun-ling,HAN Jun-he,HUANG Ming-ju(Open Laboratory of Key Subject of Photo-electronics Information Material and Devices of Henan Province; School of Physics and Electronics,Henan University,Kaifeng,Henan 475004,China);Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuous-wave Laser[J];光子学报;2011-11
8 Hu Juguang,Lin Xiaodong,Cao Huiqun,Luo Zhongkuan,Li Qiwen,Zhang Yiqian,Diao Xionghui(Shenzhen University,Shenzhen 518060,China);Effect of Substrate Temperature on the Properties of CIGS Films Prepared by PLD Method[J];稀有金属材料与工程;2011-10
9 Che Xiaozhou1,Chen Lianhua1,Ma Hongtao2,Liu Fanxin2(1.College of Materials Science & Engineering,South China Universityof Technology,Guangzhou 510640;2.SAE,Dongguan 523087,China);Laser Annealing of Diamond-Like Carbon Films[J];真空科学与技术学报;2011-01
10 CHEN Sheng,SHI Wei-min,JIN Jing,QIN Juan,WANG Yi,XIA Yi-ben (School of Material Science and Engineering,Shanghai University No.149 Yanchang Road,Shanghai,200072);Surface Mechanism of Amorphous Silicon Thin Films Crystallized by Laser[J];功能材料与器件学报;2010-06
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 Zhang Dongping;Zhu Maodong;Yang Kai;Liu Yi;Huang Rengui;Cai Xingmin;Fan Ping;College of Physics Science and Technology,Institute of Thin Film Physics and Applications,Shenzhen Key Laboratory of Sensor Technology,Shenzhen University;;Influence of oxygen partial pressure on phase transition characteristics of VO_2 thin films prepared by magnetron sputtering[J];深圳大学学报(理工版);2015-06
2 Cheng Long;Hao Huilian;Liu Jianyu;Ma Yongpin;Ding Wei;School of Materials Engineering,Shanghai University of Engineering Science;;Structure Study of Amorphous Silicon Thin Films Crystallized with the Continuous Laser[J];微纳电子技术;2015-08
3 WANG Qiang;YANG Dongqin;HUA Guoran;School of Electric and Information,Nantong University;Jiangsu Econess-energy Co.Ltd.;School of Mechanical Engineering,Nantong University;;The solar cell back-side polishing process study based on TMAH[J];功能材料;2015-14
4 LIU Zhuhong;CHEN Ming;Institute for Solar Energy System∥Guangdong Provincial Key Laboratory of Photovoltaics Technologies,Sun Yat-sen University;;Texturing Technology and Light Induced Degradation Research of Mono-like Crystalline Silicon Solar Cells[J];中山大学学报(自然科学版);2014-01
5 ZHOU De-rang;DUAN Guo-ping;CHEN Jun-ling;HAN Jun-he;HUANG Ming-ju;Open Laboratory of Key Subject of Photoelectric Information Material of Henan Province,School of Physics and Electron,Henan University;;Influence of wavelength on the crystallization of amorphous silicon thin film with CW lasers[J];光电子.激光;2013-10
6 ZHOU De-rang,DUANG Guo-ping,CHEN Jun-ling,HAN Jun-he,HUANG Ming-ju(Open Laboratory of Key Subject of Photoelectric Information Material of Henan Province,School of Physics and Electron,Henan University,Kaifeng 475004,China);Study about continuous Ar~+Kr~+ laser crystallization of amorphous silicon thin film[J];激光技术;2013-05
7 DUAN Guo-ping,CHEN Jun-ling,ZHOU De-rang,HAN Jun-he,HUANG Ming-ju(Open Laboratory of Key Subject of Photo-electronics Information Material and Devices of Henan Province,School of Physics and Electronics,Henan University,Kaifeng 475004,China);Crystallization of amorphous silicon based on excimer laser[J];激光技术;2013-02
8 DUAN Guo-ping,CHEN Jun-ling,HAN Jun-he,HUANG Ming-ju(Open Laboratory of Key Subject of Photo-electronics Information Material and Devices of Henan Province; School of Physics and Electronics,Henan University,Kaifeng,Henan 475004,China);Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuous-wave Laser[J];光子学报;2011-11
9 LIU Xi,WU Xiao-ming,REN Tian-ling(Tsinghua National Laboratory for Information Science and Technology,Institute of Microelectronics,Tsinghua University,Beijing 100084,China);Applications of Micro-Raman Spectroscopy in Microelectronics[J];光散射学报;2011-01
10 CHEN Hong-min1,DING Jian-ning1,2,3,WANG Xiu-qin1,GUO Li-Qiang2,YUAN Ning-yi1,3 (1.Low-Dimensional Materials Micro-Nano Devices and Systems Research Center,Changzhou University,Changzhou 213164,China;2.Micro-Nano Research Center,Jiangsu University,Zhenjiang 212013,China;3.Key Laboratory of New Energy,Changzhou 213164,China);Influence of Thermal Annealing on Micro-Structure and Optical Property of nc/αc-Si:H Films[J];常州大学学报(自然科学版);2010-03
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 CHEN Sui-yuan, LIU Chang-sheng, FU Gui-qin, ZHANG Ji-liang, CAI Qing-kui (School of Materials and Metallurgy, Northeastern University, Shenyang, Liaoning 110004, China);Minor Crystallization of Amorphous Alloy Fe_(73.5)Cu_1Nb_3Si_( 13.5)B_9 by Laser Irradiation[J];中国激光;2003-11
2 Chen Sui-Yuan Liu Chang-Sheng Fu Gui-Qin Ren Xiao-Yu C ai Qing-Kui (School of Material and Metallurgy, Notheastern University,S henyang 110004,China);A study of Mssbauer spectroscopy of microcrystallization of amorphous Fe_(73.5)Cu_1Nb_3Si_(13.5)B_9 irradiated by a CO_2-Laser[J];物理学报;2003-10
3 FU Gui-qin 1, DONG Wei-guo 1,CHEN Sui-yuan 1, LIU Chang-sheng 1, SHANG Li-juan 1,2,FU Xin-xin 1 (1. School of Materials and Metallurgy, Northeastern University, Shenyang, 110004 2. School of Materials Science and Engineering, Shenyang Polytech;Crystallization of amorphous alloy Fe(73.5)Cu_1Nb_3Si_(13.5)B_9 by laser irradiation[J];材料与冶金学报;2002-03
4 Zhang Fufei Zhang Luo Ji Chaolian LiYiho ng Dai Zhihua (Shanghai lron & Steel Research lnstitute );NANOCRYSTALLINE SOFT MAGNETIC ALLOYS AND ITS APPLICATION[J];上海金属;2002-01
5 LIU Zuo-quan,ZHANG Yu an-di,L Yu-song(Department of Physics,Yunnan University,Kunming 650091,C hina);SHOCK-WAVE NANOCRYSTALLIZATION OF Fe_(73.5)Cu_1Nb_3Si_(13.5)B_9 ALLOY AND ITS CHARACTE RISTICS[J];高压物理学报;2000-04
6 LIU YING\|KAI HOU DE DONG (Yunnan Normal University,Kunming\ 650092) ZHOU XIAO\|FENG (Yunnan Qujing Normal College,Qujing\ 655000) LIU ZUO\|QUAN (Department of Physics,Yunnan University,Kunming\ 650091) (Received 6 March 1999);A STUDY ON THE CHANGE OF PRIMARY PHASE α Fe IN THE SHOCK WAVE CRYSTALLIZATION OF AMORPHOUS (Fe 0.99 Mo 0.01 ) 78 Si\-9B\- 13 , Fe 78 Si 9B 13 ALLOYS[J];物理学报;1999-12
7 Xu Hui 1,2 He Shuli 2 He Kaiyuan 2 Cheng Lizhi 2 Dong Xinquan 2 (1 Institute of Materials,Shanghai Univercity,Shanghai 200072; 2 Dept of Mater Sci and Eng,Northeastern University,Shenyang 110006);Study on Curie Temperature of Intergranular Amorph ous Phase in the Nanocrystalline FeCuNbSiB Alloy[J];金属功能材料;1998-05
8 Chen Wenzhi(Central Iron and Steel Research Institute,Beijing 100081);XPS Analysis of Nanocrystalline Fe_73.5Cu_1Nb_3Si_13.5B_9Alloy[J];金属功能材料;1998-02
9 CHAO YUE SHENG TENG GONG QING GENG YAN LIU XIAO WU LAI ZU HAN (College of Science,Northeastern University,Shenyang 110006);SINGLE PHASE CRYSTALLIZATION IN AMORPHOUS Fe 78 Si 9B 13 ALLOY INDUCED BY ELECTROPULSING[J];物理学报;1997-07
10 $$$$;Crystallization of Amorphous Alloy Fe_(78)B_(13)Si_9under the Shock Wave[J];金属功能材料;1995-06
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved