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《Hydraulics Pneumatics & Seals》 2017-01
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Modeling and Control of Ultra-precision Position Stage with Macro-micro Dual-drive

LI Tong-tong;TIAN Yan-bing;HAN Sen;CHENG Long;Autom Atization Engineering College,Qingdao University of Technological;  
In order to realize the high precision positioning of the system in the large stroke, a ultra-precision position stage based on macromicro dual-drive is designed. The metallic bellows direct-drive stage is used to realize the system feed-in with a large stroke. The VCM-driven micro stage, mounted on the macro stage, realize the high precision positioning of the system and compensate the error which is generated by macro stage. The double- grating detection is used to realize closed- loop control with position signal of bellows- driven macro stage and VCM-driven micro stage. The PID closed-loop of feed-forward in macro stage and neural network PID on micro stage is came up with a compound control strategy. The experimental results show that the repeatability error is 0.6um in the large stroke with 50 mm.
【Fund】: 山东省高校科技攻关项目(J14LN26)
【CateGory Index】: TP273
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