Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Journal of Vibration and Shock》 2011-07
Add to Favorite Get Latest Update

High overload ability optimization of a MEMS high-g accelerometer

SHI Yun-bo,LI Ping,ZHU Zheng-qiang,LIU Jun,ZHANG Xiao-ming(Science and Technology on Electronic Test & Measurement Laboratory,North University of China,Taiyuan 030051,China)  
The structure to be measured is easy to destroy if a designed MEMS high-g acceleration sensor has less-overload ability and it is used in harsh impact environment.Through analyzing the effect of a sensor structure on its anti-overload capacity and collecting its structural damage statistics in high impact testing,a new method was put forward,it could optimize the overload-resistant ability of a high-g acceleration sensor.With this method,chamfers were added at root and end of a beam being the part most easily to be broken in a sensor structure in order to disperse the stress of such areas.When impact loads were exerted on a sensor structure,it could increase the high-overload-resistant ability.The feasibility of the method was analyzed with theoretical simulations.Then,sensors were tested with Hopkinson bar impact test method.The test result indicated that the high-overload-resistant capacity of an accelerometer optimized can be raised from 180,000g to 240,000g.It was shown that the proposed method can notablly increase the high-overload-resistane ability of a MENS high-g accelerameter.
【Fund】: 山西省青年学术带头人资助;; 新世纪优秀人才支持计划资助
【CateGory Index】: TP212
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 4 Hits
1 Zhou Chenggang Mao Liang Zhang Yuxin (China Satellite Maritime Tracking and Controlling Department,Jiangyin 214431,China);Study on vibration monitoring system of shipboard antenna based on MEMS[J];Foreign Electronic Measurement Technology;2012-05
2 YU Lixia;QIN Li;Liu Jun;WANG Mengmei;State Key Lab. of Electronic Test & Measurement Technique,North University of China;School of Instrument and Electronics,North University of China;;A Method of Life Prediction for Bilateral Four Beam Micro Accelerometer Under Random Vibration Environment[J];Chinese Journal of Sensors and Actuators;2014-09
3 LI Cai-hua;DENG Qiong;QI Wei;School of Aeronautics,Northwestern Polytechnical University;;Study on Dynamic Mechanical Behavior of MEMS Based on Free Hopkinson Pressure Bar[J];Science Technology and Engineering;2014-17
4 WEN Feng;SHI Yun-bo;ZHOU Zhen;REN Yong-feng;State Kay Laboratory for Electronic Measurement Technology,North University of China;;High-g accelerometer based on MEMS and its application in a projectile penetrating double-layer steel target test[J];Journal of Vibration and Shock;2013-19
【Citations】
Chinese Journal Full-text Database 4 Hits
1 LIANG Zhi-guo, LI Xin-liang, SUN Jing-yu, LIAN Da-hong (Changcheng Institute of Metrology and Measurement, Beijing 100095, China);Primary Shock Calibration of Dynamic Performance of Accelerometer by Using Laser Interferometer[J];Journal of Test and Measurement Technology;2004-02
2 WANG Zuankai ZONG Denggang LU Deren (State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academic of Sciences, Shanghai 200050, China);MECHANICAL ANALYSIS ON THE MICROMACHINED OF HIGH-g ACCELEROMETER[J];Journal of Mechanical Strength;2002-04
3 ZHANG Jing-hua, SHI Geng-chen, SUI Li(Institute of Mechatronics Engineering, Beijing Institute of Technology, Beijing 100081, China);Design of Micro-mechanical Piezoresistive Accelerometer System for Fuze[J];Journal of Institute of Command and Technology;2005-03
4 Shi Yunbo1,Liu Jun1,2,Qi Xiaojin1,Meng Meiyu1 (1 National Key Lab for Electronic Measurement and Technology,North University of China,Taiyuan 030051,China;)2 Department of Mechanical Engineering,University of California,Berkeley.Berkeley,CA,94720,USA);Fabrication and measurement of high-g MEMS accelerometer[J];Chinese Journal of Scientific Instrument;2008-07
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 XU Peng,ZU Jing,FAN Jin-biao (State Key Laboratory of Electronic Measurement Technology,North University of China,Taiyuan 030051,Shanxi,China);Research Development of High g Penetration Acceleration Test and Its Correlative Technology[J];Acta Armamentarii;2011-06
2 SUN Jian,ZHAO Yu-long , YUAN Guo-ying , JIANG Zhuang-de , XU Jing-bo (Institute of Precision Engineering ,Xi'an Jiaotong University, State Key Lab of Mechanical Manufacturing System, Xi'an 710049, China);The Design Of A Piezoresistive Three-Axis Accelerometer[J];Chinese Journal of Sensors and Actuators;2006-05
3 JING Peng,MA Tie-hua,WANG Yan(Key Lab Instrumentation Science & Dynamic Measurement of the Ministry Education,North University of China,Taiyuan 030051,China);Shock Calibration of a Piezoresistive Three-Axis High-g Microaccelerometer[J];Chinese Journal of Sensors and Actuators;2008-06
4 YANG Zhao-xin,DU Hong-mian,FAN Jing-biao,ZU Jing(National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan 030051,China);Dynamic Modeling of Acceleration Sensor Based on Generalized Least Square Method[J];Chinese Journal of Sensors and Actuators;2009-02
5 ZHAO Xiaodong,PEI Dongxing,FAN Jinbiao National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China;Calibration of the High-g Accelerometer with Laser Interferometer And the Method for Signal Processing[J];Chinese Journal of Sensors and Actuators;2009-11
6 LI Ping,SHI Yunbo,ZHU Zhengqiang,DU Kang,LIUJun(National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China);An Optimizition Method for Natural Frequecy of MEMS High-g Accelerometer[J];Chinese Journal of Sensors and Actuators;2010-03
7 ZHANG He1,SHI Yunbo1,2,TANG Jun1,ZHAO Rui1,2,LIU Jun1,5 1.Science and Technology on Electronic Test & Measurement Laboratory,North University of China,Taiyuan 030051,China;2.Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China;Testing of High-g MEMS Accelerometer and Failure Analysis[J];Chinese Journal of Sensors and Actuators;2011-10
8 QI Xiao-jin,LIU Jun,SHI Yun-bo(State Key Laboratory of Electronic Measurement Technology,North University of China,Taiyuan 030051,China);Design of high g_n micro-accelerometer[J];Transducer and Microsystem Technologies;2006-10
9 LI Xiao-hong,FAN Jin-biao,WANG yan(Electronic Test Technology Of State Key Lab,North University of China,Taiyuan030051,China);Shock calibration of a high-g piezoresistive microaccelerometer[J];Sensor World;2010-10
10 ZHANG Guoliang,ZHANG Zhijie,DU Hongmian,MENG Song (Key Laboratory of Instrumentation Science & Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China);Research on Modeling of Shock Accelerator Based on NARX Neural Network[J];Journal of Projectiles,Rockets,Missiles and Guidance;2008-03
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Li Mei (Beijing Information Institute of Science technology, Beijing 100009);Develepment and the Prospect of Microelectronics Packaging Technology[J];SEMICONDUCTOR TECHNOLOGY;2000-05
2 LI Xiu qing (The 13th Electronic Research Institute,Shijiazhuang 050051,China) ZHOU Ji hong (Hebei Institute of Architechtural Science and Technology,Handan 056038,China);State of the art and future trends of MEMS packaging[J];Semiconductor Information;2001-05
3 FANG Xu-wen,TANG Jie-ying,HUANG Qing-an(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);The reliability of MEMS devices in shock environments[J];Micronanoelectronic Technology;2004-07
4 ZHANG Zhen-hai1,LI Ke-jie1,REN Xian-ren1,LIU Jun2 (1.National Key Lab of Mechatronic Engineering and Control,Beijing Institute of Technology,Beijing 100081,China;2.National Key Lab of Electronic Measurement Technology,North University of China,Taiyuan 030051,Shanxi,China);Design,Simulation and Optimization of Sensing Chip of High-g Three-axis MEMS Accelerometer[J];Acta Armamentarii;2008-06
5 Yao Jun Cao Xinkuan Jiang Tongmin(Dept.of System Engineering of Engineering Technology,Beijing University of Aeronautics and Astronautics,Beijing 100083,China);Quantitative assessment approach of RET based on interference model[J];Journal of Beijing University of Aeronautics and Astronautics;2006-01
6 WANG Cheng-hua,CHEN Pei-yin,XU Xiao-cheng (Beijing Institute of Space Long March Vehicle,Beijing 100076,China);Filtering of penetration deceleration data and determining of penetration deceleration on the rigid-body[J];Explosion and Shock Waves;2007-05
7 ZHOU Ning1,2,REN Hui-qi2,SHEN Zhao-wu1,HE Xiang2,LIU Rui-zhao2,WU Biao2 (1.Department of Modern Mechanics,University of Science and Technology of China,Hefei 230026,Anhui,China;2.Luoyang Institute of Hydraulical Engineer,Luoyang 471023,Henan,China);An engineering analytical model for projectiles to penetrate into semi-infinite reinforced concrete targets[J];Explosion and Shock Waves;2007-06
8 WEN Feng,REN Yong-feng,WANG Qiang (National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,Shanxi,China);Design of a bomb-borne solid-state recorder for high-shock test and its application[J];Explosion and Shock Waves;2009-02
9 HUANG Jia-rong1,LIU Rui-chao1,HE Xiang1,SUN Gui-juan1,2,XU Peng3 (1.Luoyang Institute of Hydraulic Engineering Technology,Luoyang 471023,Henan,China; 2.State Key Laboratory of Explosion Science and Technology,Beijing Institute of Technology, Beijing 100081,China; 3.Department of Electronic Engineering,North University of China, Taiyuan 030051,Shanxi,China);A new data processing technique for measured penetration overloads[J];Explosion and Shock Waves;2009-05
10 GAO Jian-fei,XIONG Ji-jun,GUO Tao,FAN Bo (Key Laboratory of the Electronic Measurement Technology of the National Defense,North University of China, Taiyuan 030051, China);Micro Accelerometer Reliability in Shock Environment[J];Chinese Journal of Sensors and Actuators;2008-02
【Secondary References】
Chinese Journal Full-text Database 2 Hits
1 Zhang Baoqin;Lei Baozhen;Zhao Linhui;Li Shigang;Zheng Yeming;Mechanical and Electrical School,Beijing Union University;;Research on vibration method of fan blade fault forecasting[J];Journal of Electronic Measurement and Instrumentation;2014-03
2 FENG Lei;MA Tie-hua;National Key Laboratory for Electronic Measurement Technology,North University of China;Ministerial Key Laboratory of Instrumentation Science & Dynamic Measurement,North University of China;;Transverse effect on sensitivity of high impact accelerometer and measurement error caused by mounting of accelerometer[J];Journal of Vibration and Shock;2014-20
【Secondary Citations】
Chinese Journal Full-text Database 6 Hits
1 Fei Long;Zhong Xianxin;Wen Zhiyu;Gao Yang(The Open Laboratory Optoelectronic Technology and System of the State Education Commission, Chongqing University);Present Status and Developing Directions of Micromachined Silicon Acceleromter[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1995-05
2 LIANG Zhi-guo, LI Xin-liang, SUN Jing-yu, LIAN Da-hong (Changcheng Institute of Metrology and Measurement, Beijing 100095, China);Primary Shock Calibration of Dynamic Performance of Accelerometer by Using Laser Interferometer[J];Journal of Test and Measurement Technology;2004-02
3 Yang Heng, Bao Minhang, Shen Shaoqun, Li Xinxin, Ren Jianjun (Department of Electronic Engineering);The Displacement Characteristics of the Micromechanical Structures Driven by Electrostatic Force[J];JOURNAL OF FUDAN UNIVERSITY;1999-03
4 ;A Precise Digitizing Demodulation Method of the FM Signal[J];Measurement & Control Technology;2002-11
5 Liang Zhiguo (Changcheng Institute of Metrology & Measurement, Beijing,100095) Zhu Jijie (Air Traffic Management Bureau, CAAC,Beijing 100021);The Equivalent Sampling Period Method for the Identification and Evaluation of the Transfer Function of Data Acquisition Systems[J];ACTA METROLOGICA SINICA;1999-03
6 WANG Zuankai ZONG Denggang LU Deren (State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academic of Sciences, Shanghai 200050, China);MECHANICAL ANALYSIS ON THE MICROMACHINED OF HIGH-g ACCELEROMETER[J];Journal of Mechanical Strength;2002-04
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved