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《Journal of Vibration and Shock》 2015-22
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Displacement resolution of precision stage driven by linear ultrasonic motors

WANG Jin-peng;ZHOU Hong-ping;SHI Yun-lai;College of Mechanical and Electronic Engineering,Nanjing Forestry University;State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics & Astronautics;  
Nanometer-accuracy stage is widely needed in the scanning tunneling microscope( STM),lithography,precision medical equipments,and so on. In the traditional style of driving method,large stroke and high accuracy is as usual a pair of contradiction for precision stage. However,the precision stage driven by linear ultrasonic motor( LUSM)may reconcile the problem. For an established linear ultrasonic motors system,the influential factors to displacement resolution were studied. The possible minimum step of the stage was discussed in the light of the dead-time theory and the start-stop experimental curve. Then,under the help of XL-80 laser interferometer,the relationships between the microstep distance of the stage and the driving factors,such as the driving waveform,pre-pressure and driving voltage,were studied respectively by experiments. The experimental results show that the displacement resolution is 25 nm.
【Fund】: 国家自然科学基金资助项目(51408311 91223201 51275235);; 江苏省自然科学基金(BK2012797)
【CateGory Index】: TM359.4
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