A study of an angle vibration measuring method
LIU Aidong;YU Mei;HE Wen;National Institute of Metrology;Key Laboratory of Advanced Manufacturing Technology of Zhejiang Province,School of Mechanical Engineering,Zhejiang University;
Primary standard of angular vibration devices have been developed in the National institute of Metrology.The maximum angular displacement of low angular vibration device is 300 ° and medium angular vibration device is 60 °.The dynamic range of angular accelerate is 0. 04 rad/s~2 to 2 000 rad/s~2. Diffraction grating and heterodyne laser interferometer acted as the main measurement method. At the same time,circular grating and two-beam heterodyne laser interferometer differential measurement have been realized. Uncertainty of measurement of angular accelerate sensitivity( k = 2) is: 0. 5%,0. 5°( reference),and others are better than 1. 0%,1. 0° in whole frequency band.
【CateGory Index】： TB936