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《Journal of Zhejiang University(Engineering Science)》 2004-10
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Study on performance of Nb_2O_5 films with ion assisted deposition

ZHANG De-jing, LI Ming-yu, GU Pei-fuejiang University, Hangzhou 310027, China)  
In order to enhance the optical and mechanical property of Nb__2O__5 films, Nb__2O__5 films were deposited on K9 glass substrates using an e-beam gun evaporation with low energy oxygen ion assisted deposition (IAD) from an end-Hall ion source. Comparison of the optical and mechanical performance of the Nb__2O__5 films with IAD and without IAD was made .The results show that Nb__2O__5 films deposited with ion assist were much more profitable than those deposited without ion assist. The IAD increased the packing density of Nb__2O__5 films by 14%, hence the refractive index arose from 2.03 up to 2.18 and the adhesion rose from about 1×10~~7N/m~~2 to 129.7×10~~7N/m~~2.
【Fund】: 国家自然科学基金资助项目(6007801).
【CateGory Index】: O484
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