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《Journal of Zhejiang University(Engineering Science)》 2007-04
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Micro fabrication of micro fluidic glass chip without clean room condition

XIE Hai-bo,FU Xin,YANG Hua-yong (State Key Laboratory of Fluid Power Transmission and Control,Zhejiang University,Hangzhou 310027,China)  
A micro fabrication process for micro fluidic glass chip was proposed to shake off the dependence of glass chip fabrication process on special technological equipment.The process mainly includes glass wet etching and thermal bonding.A series of comparable experiments on glass wet etching were carried out to observe the effects with different etching solutions and mixture ratios on the etching results.The research was mainly for two typical applications,high etching rate for deep etching and high surface quality for capillary channels.In thermal bonding process,surface affinity treatment,vacuum pro-bonding and bonding temperature control were studied experimentally without clean room condition.The new process provides basic schemes and empirical curves of fabrication of microfluidic glass chip for chemistry and biomedicine.
【Fund】: 国家自然科学基金重点资助项目(50335010)
【CateGory Index】: TN492;TN405
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【References】
Chinese Journal Full-text Database 1 Hits
1 Wu Yangyang,Ni Junfang(School of Mechanical and Electrical,Suzhou University,Suzhou 215021,China);The Research of Glass Microfluidic Chip Processing Technology[J];Journal of Suzhou University(Engineering Science Edition);2009-01
【Citations】
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1 Yin Xuefeng, Fang Qun, Lin Yunyang(Institute of Microanalysis Systems, Zhejiang University,310028 Hangzhou,P.R.China);Microfabrication Techniques for Production of Microfluidic Chips[J];Modern Scientific Instruments;2001-04
【Co-citations】
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1 CHEN Hui-qing,ZHU Qing-huan,XU Hai-juan(Inst.of Information and Eng.,Shaoguan Univ.,Shaoguan 512005,China);Research of the Microfluidic Chip Fluorescence Detection[J];Research and Exploration in Laboratory;2007-06
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3 ZHANG Feng-lian,ZHU Jing(The School of Mechanical Engineering of Dalian Jiaotong University,Dalian 116028,China);Design of Hot Embossing and Bonding Machine for Microfludic Chips Fabrication[J];Microfabrication Technology;2006-03
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1 HUANG Teng-chao, SHEN Yi-bing, CHEN Hai-xing, LOU Di, HOU Xi-yun g University, Hangzhou 310027, China);Research on K9 glass wet etching for MOEMS devices[A];[C];2004
【Co-references】
Chinese Journal Full-text Database 3 Hits
1 Yu Pin-zhao(Development Center of Water Treatment Technology,SOA,Hangzhou 310012,China);PREPARATION OF HOLLOW FIBER NF MEMBRANE WITH CO-BLEND CTA/PVDF[J];Technology of Water Treatment;2005-12
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