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《Journal of Zhejiang University(Engineering Science)》 2007-04
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Micro fabrication of micro fluidic glass chip without clean room condition

XIE Hai-bo,FU Xin,YANG Hua-yong (State Key Laboratory of Fluid Power Transmission and Control,Zhejiang University,Hangzhou 310027,China)  
A micro fabrication process for micro fluidic glass chip was proposed to shake off the dependence of glass chip fabrication process on special technological equipment.The process mainly includes glass wet etching and thermal bonding.A series of comparable experiments on glass wet etching were carried out to observe the effects with different etching solutions and mixture ratios on the etching results.The research was mainly for two typical applications,high etching rate for deep etching and high surface quality for capillary channels.In thermal bonding process,surface affinity treatment,vacuum pro-bonding and bonding temperature control were studied experimentally without clean room condition.The new process provides basic schemes and empirical curves of fabrication of microfluidic glass chip for chemistry and biomedicine.
【Fund】: 国家自然科学基金重点资助项目(50335010)
【CateGory Index】: TN492;TN405
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