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《Journal of Zhejiang University(Engineering Science)》 2007-12
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Theoretical improvement and experimental design of prism coupler

XIAO Bing-gang1,2,HU Jun2(1.College of Information Engineering,China Jiliang University,Hangzhou 310018,China; 2.Center for Optical and Electromagnetic Research,Zhejiang University,Hangzhou 310058,China)  
The measurement principle and experimental design of a normal prism coupler were discussed in order to accurately measure the film thickness and refractive index.The theoretical errors of a normal prism coupler measurement model were investigated,then an accurate model was presented through improving the measurement theory.The convenient method for calculating the thickness and refractive index of a dielectric film was given and its theoretical errors were analyzed.The method was proved by propagating matrix method.With the specially designed experiment equipment,the thickness and refractive index of a Su-8 film on glass substrate by spinning coating were measured using the accurate model.The results showed that the precision measurement model improves the measurement accuracy.
【Fund】: 浙江省光纤通信技术重点研究实验室资助项目
【CateGory Index】: TN929.1
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