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《Journal of Zhejiang University(Engineering Science)》 2009-04
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Modeling and simulation of micromachined gyroscope

ZHANG Xia,ZHENG Xu-dong,WANG Hao,JIN Zhong-he (Department of Information Science and Electronic Engineering,Zhejiang University,Hangzhou 310027,China)  
A system level model was built according to the dynamic equation of micromachined gyroscope with electromagnetic driving and capacitive detecting and the transfer functions of the interface circuits on Simulink platform in order to reduce the noise of micromachined gyroscope system and enhance system resolution.Mechanical-thermal noise of sensor,electronic-thermal noise of circuits and coupling effects in sensor were added to the model.Therefore,the model not only could get the functional simulation results of gyroscope system,but also could quantify the effect of each noise source on system performance and find the main noise source under different coupling effects.Simulation results show that capacitance-voltage(CV) conversion circuit was the main noise source when the coupling effects in gyroscope were weak;the band-pass filter of gyroscope self-excitation circuit became the main noise source when the coupling effects were robust.Simulation results were validated with the experiment.
【Fund】: 国家“973”重点基础研究发展规划资助项目(2006CB300405)
【CateGory Index】: V241.5
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【References】
Chinese Journal Full-text Database 3 Hits
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【Co-references】
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1 LUO Bing,ZHANG Hui,WU Mei-ping(College of Mechatronic Engineering and Automation,National University of Defense Technology,Changsha 410073,China);Quadrature signal of microgyroscope and its effect on signal detection[J];中国惯性技术学报;2009-05
2 ZHANG Xia,ZHENG Xu-dong,WANG Hao,JIN Zhong-he (Department of Information Science and Electronic Engineering,Zhejiang University,Hangzhou 310027,China);Modeling and simulation of micromachined gyroscope[J];浙江大学学报(工学版);2009-04
3 YIN Yong1,WANG Shou-rong1,WANG Cun-chao1,YANG Bo1,SHENG Ping1,TIAN Zhong2 (1. School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;2. Department of Communication,Second Artillery Command College of the Chinese PLA,Wuhan 430012,China);Dual-mass silicon micro-gyroscope[J];中国惯性技术学报;2008-06
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8 WANG Ling*,LIU Jun,SHI Yun-bo(National Key Lab for Electronic Measurement and Technology,North university of China,Taiyuan 030051,China);Design of Differential Capacitance Detection Circuit[J];传感技术学报;2006-06
9 WANG Cun-chao,SU Yan,WANG Shou-rong (Dept. of Instrument Science and Engin. Southeast Univ. Nanjing 210096, China);Research on Self-Excited Driving of the Silicon Micromachined Vibratory Gyroscope Driver[J];传感技术学报;2006-02
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1 SHI Yun-bo;YANG Zhi-cai;WANG Yan-yang;CHEN Yan-xiang;ZHI Dan;Science and Technology on Electronic Test & Measurement Laboratory, North University of China;Key Laboratory of Instrumentation Science & Dynamic Measurement of Education Ministry, North University of China;School of Instrument and Electronics, North University of China;;Impact test and failure analysis of high-range piezo-resistive accelerometer based on Hopkinson bar[J];中国惯性技术学报;2015-06
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3 CAO Hui-liang;LI Hong-sheng;SHEN Chong;SHI Yun-bo;LIU Jun;YANG Bo;Key Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China;School of Instrument Science and Engineering, Southeast University;;Design and test on quadrature error correction system of dual-mass silicon MEMS gyroscope[J];中国惯性技术学报;2015-04
4 ZOU Yang;XU Qifeng;Fuzhou University;;Dual-end electrostatic film vibration voltage transformer[J];电力自动化设备;2015-04
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