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《China Mechanical Engineering》 2004-02
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A Novel Micromachined Gyroscope Based on Slide-film Damping Effects

Chen YongJiao JiweiXiong BinChe LufengLi XinxinWang Yuelin Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050  
A novel tuning fork gyroscope, based on silicon bulk micromachining technology, was reported. The gyroscope consists of two oscillating masses each of which supports one sensitive mass with bar electrodes. The Coriolis force led by angular speed applied to the device was sensed by the differential changes of capacitances between the bar electrodes and the electrodes on the glass substrate. The damage caused by the common footing effects and lag effects in deep reactive ion etching had been improved significantly. The measurement sensitivity of the sensors and the nonlinearity are very ideal.
【Fund】: 国家重点基础研究发展规划资助项目(G19990 3 3 10 1)
【CateGory Index】: TH703
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