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《China Mechanical Engineering》 2009-18
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An Electrostatically-driven Capacitively-sensed Frame Microgyroscope Fabricated with an Improved Process Flow

Zheng Xudong Hu Shichang Zhang Xia Jin Zhonghe Wang Yuelin Zhejiang University,Hangzhou,310027  
This paper presented a new bulk micromachined frame gyroscope with decoupled driving and sensing modes and the improvement of its process flow.The outer frame was driven into primary oscillation by electrostatic force,while the inner proof mass senses rate signal by varying overlapped area of electrodes,which eliminated the nonlinear instinct by varying gap.Damping factors for both driving and sensing modes were low,because the driving motion and sensing motion both moved in-plane.This also resulted in high quality factors at atmosphere.A large proof mass can be made by DRIE,which also ensured that large dimensions of spring beams were made to lower coupling and increased pull-in voltage.Damages to gyroscope devices caused by the footing effect during deep reactive ion etching(DRIE) were reduced by the improved process flow,which also increased the proof mass by 50%.Driving and sensing characteristics of a prototype have been tested and functional behavior of the gyroscope has been tested as well and the results are given.
【Fund】: 国家重点基础研究计划资助项目(2006CB300405);; 教育部新世纪优秀人才支持计划资助项目(NCET-06-0514)
【CateGory Index】: TH703
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