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《China Mechanical Engineering》 2016-01
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Data Mining for Orders' LT Forecasting in Wafer Fabrication

Wang Junliang;Qin Wei;Zhang Jie;Shanghai Jiao Tong University;  
The accurate prediction of LT plays an important role to help semiconductor manufacturers keep the promises of an accurate and steady delivery-time.However,the large production scale,and long cycle time significantly substantiated the complexity of such a problem.Based on large amounts of manufacturing data,a regression-based model which took account of thousands of parameters was proposed to obtain the correlation among 1669 manufacturing variables and LT.To select"LT-related"variables which had high mean Z-transformed correlations,the Fisher Z-transformation was applied,and the case-based reasoning method was designed to forecast orders' LT accurately.
【Fund】: 国家自然科学基金资助重点项目(51435009)
【CateGory Index】: F274;F407.6;TP311.13
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