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《Journal of the Graduate School of the Chinese Academy of Science》 2003-01
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Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology

YU Jin Zhong ** WEI Hong Zhen YAN Qin Feng XIA Jin Song ZHANG Xiao Feng ( State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China )  
Integrated multimode interference (MMI) coupler based on silicon on insulator (SOI) has been becoming a kind of more and more attractive device in optical systems. SiO 2 thin cladding layers (1.0 μm) can be usedin SOI waveguide due to the large index step between Si and SiO 2 , making them compatible with VLSI technology. The design and fabrication of MMI optical couplers and optical switches in SOI technology are presented in the paper. We demonstrated the switching time of 2×2 MMI MZI thermo optical switch is less than 20 μs.
【Fund】: supportedbyNationalMinistryofScienceandTechnology(G2 0 0 0 0 3 666)andtheNationalSeienceFoundationofChina(698962 60and 69990 5 40 )
【CateGory Index】: TN256
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【References】
Chinese Journal Full-text Database 1 Hits
1 Feng Song;Gao Yong;Department of Electronic Engineering,Xi’an University of Technology;School of Science,Xi’an Polytechnic University;;Analysis of coupling between nanotaper SiGe-SOI waveguide and fiber[J];Journal of Semiconductors;2014-07
【Co-references】
Chinese Journal Full-text Database 2 Hits
1 Feng Song1, Gao Yong1, Yang Yuan1, and Feng Yuchun2 (1 Department of Electronic Engineering, Xi'an University of Technology, Xi'an 710048, China) (2 Key Laboratories of Optoelectronic Devices and Systems, Shenzhen University, Shenzhen 518060, China);Mode analysis and structure parameter optimization of a novel SiGe-OI rib optical waveguide[J];半导体学报;2009-08
2 YU Jin Zhong ** WEI Hong Zhen YAN Qin Feng XIA Jin Song ZHANG Xiao Feng ( State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China );Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology[J];中国科学院研究生院学报;2003-01
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