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Micronanoelectronic Technology
FQ: 月刊
AD of Publication: 河北省石家庄市
Lanuage: 中文;
ISSN: 1671-4776
CN: 13-1314/TN
YP: 1964
Url: 中国电子科技集团公司第十三研究所
Recommended Journals
Micronanoelectronic Technology
2002 -01
Tech nology of RF MEMS LIANG Chun-guang (The13th Electronic Research Instiute,Shijiazhuang050051,China)
The fabrication and characterization on nano-scale semiconductor ma te rials WANG Zhan-guo (Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing100083,China)
Single-electron device ZHAO Zheng-ping,GUO Rong-hui (The13th Electronic Research Instiute,Shijiazhuang050051,China)
Survey and development of MEMS ZHANG Wei,ZHANG Da-cheng,WANG Yang-Yuan (Institute of Microelectronics,Peking University,Beijing100871,China)
Nanodevices and single-electron transistors WANG Tai-hong (Institute of Physics,Chinese Academy of Sciences,Beijing100080,China)
Strange features of nano crystalline silicon diode HE Yu-liang (The Physics Department of Nanjing University,Nanjing210093,China)
Formation of SiC nanowires on SiO_2 substrate by magnetron sputtering and annealing AN Xia,ZHUANG Hui-zhao,XUE Cheng-shan,YANG Li ( Semiconductor Institute of Shandong Normal University,Jinan250014,China )
Self-aligned OHR technology for metal lift-off an d substrate etching YAN Gui-zhen,ZHANG Da-cheng,LI Ting,WANG Ying (Institute of Microelectronics,Peking University,Beijing100871,China)
Fabrication of mask for x-ray nanolithography by ion beam HAN Yong,PENG Liang-qiang,JU Xin,YI Fu-ting,ZHANG Ju-fang,WU Zi-yu (Institute of High Energy Physics,Beijing100039,China)
2002 Issues:  [01] [02] [03] [04] [05] [06] [07] [08] [09] [10] [11] [12]
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