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Micronanoelectronic Technology
FQ: monthly
AD of Publication: China
Lanuage: English
ISSN: 1671-4776
CN: 13-1314/TN
YP: 1964
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Micronanoelectronic Technology
2009 -12
Catalog
Failure Analysis of MEMS Accelerometers with Comb Structures Under Shock Lin Zhoufeng1
Experiment Investigation of Enhancement Micromixing by Microbubble Actuators Wang Bin1a
A Novel 3-Degree-of-Freedom(3-DOF)Oscillational MEMS Gyroscope Zhu Kuibao
A Method of Fabricating Polymer Solid Microneedles Xiao Lijun
Parameter Optimization Based on High-Aspect Ratio Si Dry Etching Chen Shaojun
Fabrication of High Aspect Ratio Muti-Steps on Si by Dry Etching Liu Peng
On-Line Examination Method of Bonding Strength Measurement in Silicon MEMS Devices Li Renfeng1
Technology of Micro Droplet Atomizers Based on Surface Acoustic Wave Zhang Guan
Application of FIR Digital Filters in MEMS Accelerometers Gu Weidong
ANSYS Simulation on the Dissemination State of SAW Resonators Chen Yingduan1
MEMS Probe Cards for IC Industry Cheng Rong
Progress of SAW Gas Sensors Li Haofeng
2009 Issues:  [12] [11] [10] [09] [08] [07] [06] [05] [04] [03] [02] [01]
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