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Opto-Electronic Engineering
FQ: monthly
AD of Publication: China
Lanuage: English
ISSN: 1003-501X
CN: 51-1346/O4
YP: 1974
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Opto-Electronic Engineering
1997 -S1
Catalog
Optical Design and Manufacture of i Line Projection Lens for Submicrometer Photolithography Lin Dajian
Rim Phase Shifting Mask Technique Feng Boru
Design of Hybrid Refractive/Diffractive Achromatic Telescope Objective Using Binary Optical Element Zhou Chongxi
Model ISI 2802 Laser Direct Write System and Its Applications Hou Desheng
Pattern Editing Software for Laser Direct Write System Bai Linbo
Research on the Technologies for Laser Direct Writing Qiu Chuankai
Fabrication of Binary Optical Elements with Reactive Ion Etching Technology Zhang Jin
Research on the Technological Factors for the Reactive Ion Etching Zhang Jin
Technology Investigation in Making Quartz Binary Diffractive Optical Elements Zhou Lishu
Design of Binary Optics 2 D Laser Scanner Zhou Chongxi
Etching Fused Quartz With CHF 3/Ar Zhou Mingbao
Intelligent System for Mask Phase Shifter Design Yang Daiming
Numerical Calculations of Vector Diffraction Theory of Sub Wavelength Phase Gratings Fu Kexiang
Testing of the Diffraction Efficiency of Fresnel Micro Lens Array Wang Zhiheng
Measurement of the Central Position of the Micro spot with Double Edge Combination Zhou Mingbao
The Application Research on the Alignment Technique in the Laser Direct Write System Qiu Chuankai
Deep UV and X Ray Microlithography Feng Boru
1997 Issues:  [S1] [06] [05] [04] [03] [02] [01] [S1]
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