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FABRICATION OF CALIBRATION SAMPLES FOR BORON ION IMPLANTATION INTO SILICON |
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LVU, Dezhong, Xue Zhengmiu, Xu Guozhe,
Zhu Ziyu, Lu Dong yuan. (Shanghai Institute of Test Techniques) |
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UNIFORMITY CONTROL OF HIGH CURRENT ION IMPLANTATION |
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Xu Daolin
(The 48th Research Institute of the Ministry of Machinery and Electronics Industry, Changsha) |
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A NEW METHOD FOR BRIGHTNESS MEASUREMENT OF FIELD EMISSION ELECTRON GUN |
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Yang Deqing, Chen Ergang
(Department of physics, Yunnan University, Kuming) |
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GEMS INVERSTIGATION ON AMORPHOUS ALLOY Fe_(40)Ni_(38)Mo_4 B_(18) IMPLANTED WITH HELIUM IONS |
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Tang Jingting (Changsha Research Institute of Equipment for Semiconductor Technologies) |
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FORMATION OF SIMOX STRUCTURE BY LOW-TEMPERATURE(550 C) ANNEALING |
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Chen Nanxiang, Wang Zhonglie Huang Chang (Inst.of Low Energy Nuclear Physics, Beijing Normal Univ.) |
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ON A BASIC PRINCIPLE IN THE PROCESS EXTRACTING METAL IONS BY PLASMA CHEMICAL REACTION IN HF ION SOURCE |
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Bai Quibin Shi Xiuling Meng Zhaoxing (Beijing Normal Univ.) |
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STUDY OF IMPROVEMENT ON WEARABILITY OF WEAR-RESISTANT GRAIN BY IMPLANTATION OF N INTO METALS |
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Kan Xiwen (Beijing Normal University) |
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APPLICATIONS OF LOW ENERGY ION BEAM TO FILM DEPOSITION |
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Ren Zizhang, Wang Xianming, Yao Zhenyu, Liu Zikai, Qin Fuquang
(Institute of Semiconductors, Academia Sinica) |
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VACUUM SYSTEM OF MODEL DB-5 RASTER SCANNING ELECTRON BEAM EXPOSURE MACHINE |
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Zhuang Binghe
(The 48th Research Institute of the Ministry of Machinery and Electronics Industry, Changsha) |
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DESIGN OF MODEL TS-1 FULL-AUTOMATIC PUSHER ELECTRIC KILN |
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Liu Yicheng, Guo Lilian, Zhou Yuonming
(The 48th Research Institute of the Ministry of Machinery and Electronics Industry, Changsha) |
