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Microfabrication Technology
FQ: 双月
AD of Publication: 湖南省长沙市
Lanuage: 中文;
ISSN: 1003-8213
CN: 43-1140/TN
YP: 1983
Url: 中国电子科技集团公司第48研究所
Recommended Journals
Microfabrication Technology
1991 -01
Catalog
FABRICATION OF CALIBRATION SAMPLES FOR BORON ION IMPLANTATION INTO SILICON LVU, Dezhong, Xue Zhengmiu, Xu Guozhe, Zhu Ziyu, Lu Dong yuan. (Shanghai Institute of Test Techniques)
UNIFORMITY CONTROL OF HIGH CURRENT ION IMPLANTATION Xu Daolin (The 48th Research Institute of the Ministry of Machinery and Electronics Industry, Changsha)
A NEW METHOD FOR BRIGHTNESS MEASUREMENT OF FIELD EMISSION ELECTRON GUN Yang Deqing, Chen Ergang (Department of physics, Yunnan University, Kuming)
GEMS INVERSTIGATION ON AMORPHOUS ALLOY Fe_(40)Ni_(38)Mo_4 B_(18) IMPLANTED WITH HELIUM IONS Tang Jingting (Changsha Research Institute of Equipment for Semiconductor Technologies)
FORMATION OF SIMOX STRUCTURE BY LOW-TEMPERATURE(550 C) ANNEALING Chen Nanxiang, Wang Zhonglie Huang Chang (Inst.of Low Energy Nuclear Physics, Beijing Normal Univ.)
ON A BASIC PRINCIPLE IN THE PROCESS EXTRACTING METAL IONS BY PLASMA CHEMICAL REACTION IN HF ION SOURCE Bai Quibin Shi Xiuling Meng Zhaoxing (Beijing Normal Univ.)
STUDY OF IMPROVEMENT ON WEARABILITY OF WEAR-RESISTANT GRAIN BY IMPLANTATION OF N INTO METALS Kan Xiwen (Beijing Normal University)
APPLICATIONS OF LOW ENERGY ION BEAM TO FILM DEPOSITION Ren Zizhang, Wang Xianming, Yao Zhenyu, Liu Zikai, Qin Fuquang (Institute of Semiconductors, Academia Sinica)
VACUUM SYSTEM OF MODEL DB-5 RASTER SCANNING ELECTRON BEAM EXPOSURE MACHINE Zhuang Binghe (The 48th Research Institute of the Ministry of Machinery and Electronics Industry, Changsha)
DESIGN OF MODEL TS-1 FULL-AUTOMATIC PUSHER ELECTRIC KILN Liu Yicheng, Guo Lilian, Zhou Yuonming (The 48th Research Institute of the Ministry of Machinery and Electronics Industry, Changsha)
1991 Issues:  [01] [02] [03] [04]
More Issues:   [1992]   [1993]   [1994]   [1995]   [1996]   [1997]   [1998]   [1999]   [2000]   [2001]   [2002]   [2003]   [2004]   [2005]   [2006]   [2007]   [2008]
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