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Chinese Journal of Sensors and Actuators
FQ: 月刊
AD of Publication: 江苏省南京市
Lanuage: 中文;
ISSN: 1004-1699
CN: 32-1322/TN
YP: 1988
Url: 中国微米纳米技术学会;东南大学
Recommended Journals
Chinese Journal of Sensors and Actuators
2006 -05
Catalog
System-Level Design Methodology and Application in Integrated Testing System GUAN Le~ 1,2* ,CHU Jin-kui~ 1,2 ,WANG Xiao-dong~ 1,2 ,ZHANG Duan-qin~ 1,2 ,WANG Li-ding~ 1,2 1.Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education, Dalian 116023,china; 2.Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 116023,china
MEMS Macromodeling Based on Krylov Subspace Projection Method YAN Zi-jian,YUAN Wei-zheng,LV Xiang-lian,LI Jun,CHANG Hong-long (MEMS/NEMS Laboratory, Northwestern Polytechnical University, Xi’an 710072, China)
One Novel MEMS Integrated Design Tool with Maximal Six Design Flows CHANG Hong-long,XIE Jian-bing, XU Jing-hui,YAN Zi-jian,YUAN Wei-zheng (Micro and Nano Electro-Mechanical System Laboratory, Northwestern Polytechnical University, Xi’an 710072, China)
Modeling and Simulation of the Drug Release from PLGA Drug Delivery Micro-system Based on Monte Carlo model WANG Xiao-peng,CHEN Tian-ning,YANG Zhan-xiao (School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049,China)
Deflection Model and Optimization of Piezoelectric Multilayer Cantilever Based on Silicon FANG Hua-jun,LIU Li-tian,REN Tian-ling (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
A Novel Transfer Method from 3D Model to 2D Mask Layout XU Jing-hui,YUAN Wei-zheng,CHANG Hong-long,XIE Jian-bing (Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi’an 710072, China)
Improvement of Transient Response of Eletrostatically Actuated MEMS An State Feedback Viewpoint FENG Ren-jian,YU Shang-min,WAN Jiang-wen,WU Yin-feng (Measuring & Communication and MEMS Center Beijing University of Posts and Telecommunications, Beijing 100876, China)
The System Lever Application of Comb Resonator Macromodel LI Jun,LI Xiao-ying,LV Xiang-lian,YAN Zi-jian,CHANG Hong-long (Micro and Nano Electromechanical Systems Laboratory,Northwestern Polytechnical University, Xi’an 710072, China)
3D Structure Building Algorithm of MEMS Device Based on Layout And Process DENG Wei, LI Wei-hua (Key Laboratory of MEMS of Ministry of Education,, Southeast University, Nanjing 210096, China)
Structural Design of Novel Micro Piezoelectric Cantilevers with Low Stiffness and High Resonance Frequency ZHAO Gang, CHU Jia-ru (Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230027,China)
Nonlinear Dynamic Study of Micro-Resonator Including Viscous Air Damping GAO Rong,WANG Xiao-jing,ZHANG Xiao-xiang,WANG Min,YU Mao-hua,XIE Ming-chun (School of Mechanical Electronic Engineering and Automation, Shanghai University,Shanghai 200072,China)
A Nodal Analysis Model for In-Plane Electrothermal Microactuators LI Ren-gang, HUANG Qing-an,LI Wei-hua (Key Lab of MEMS of Ministry of Eduaction, Southeast University, Nanjing, 210096, China)
A Nodal Analysis Method for An Electrically Actuated Microbeam LI Min, HUANG Qing-an,LI Wei-hua (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096,China)
Macromodeling of Electrostatically Actuated Circular Plate Based on mode analysis LIN Xie-Zhao~ 1,2* ,YING Ji~1 1.Microsystem Center for Research and Development, ZheJiang University, Hangzhou 310027,China; 2. The college of mechanical engineering and automation Fuzhou university,Fuzhou 350002,China
The Algorithm of Automatic Optimization of MEMS Devices LAI Wen-bin,LI Wei-hua (Key Laboratory of MEMS of Education Ministry, Microelectronics Center, Southeast University, Nanjing 210096, China)
Method of System-level Dynamic Simulation for A MEMS Cantilever Based on the Mechanical Description ZHANG Jian, LI Wei-hua (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China)
ICP Process in Fabrication of Micro-Inertial Devices ZHUO Min, JIA Shi-xing,ZHU Jian,ZHANG Long (Nanjing Electronic Devices Institute, Nanjing 210016,China)
Low Temperature Wafer Direct Bonding Using Wet Chemical Surface Activation LIN Xiao-hui~ 1* , LIAO Guang-lan~1 ,SHI Tie-lin~ 1,2 ,NIE Lei~1 1. School of Mechanical Science & Engineering, Huazhong University of Science and Technology Wuhan 430074,China; 2. Wuhan National Laboratory for Optoelectronics, Wuhan 430074,China
Studies on MEMS Neural Micro Probe CHENG Zheng-xi,HUANG Wei-ning,ZHOU Jia,HUANG Yi-ping, BAO Min-hang (ASIC and System State Key Lab,Department of Microelectronics,Fudan University, Shanghai 200433,China)
Fabrication and Characterization of Free Standing Structure Membrane with High Width-Thickness Ratio LI Bo, XU Chen, ZHAO Hui, ZHAO Lin-lin, HUO Wen-xiao, SONG Yi-chao, SHEN Guang-di (College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing Optoelectronic Technology Laboratory, Beijing 100022, China)
The Research of Anti-Adhesive Film by RIE Deposition in MEMS/NEMS GU Pan, LIU Jing-quan, CHEN Di,SUN Hong-wen National Key Laboratory of Nano/Micro Fabrication Technology, Key laboratory for thin film and microfabrication of Ministry of Education, Institute of Micro and Nano science and technology, Shanghai Jiaotong University, Shanghai 200030 , China
Micro-Gear Fabrication Using Amorphous Carbon Films ZHANG Ji-cheng, WU Wei-dong, TANG Yong-jian ( Research Center of Laser Fusion, CAEP, P.O.Box 919-987, Mianyang Sichuan 621900, China )
A Technology for Making Silicon Film on Trenched Silicon Substrate ZHANG Zheng-yuan,XU Shi-lu,FENG jian,HU Ming-yu (National Laboratory of Analog Integrated Circuits, Chongqing 400060,China)
Design and Fabrication of a Multichannel Silicon-based Microelectrode Probe for Neural Recording ZHANG Ruo-xin, SUI Xiao-hong, PEI Wei-hua,CHEN Hong-da (State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors Chinese Academy of Sciences, Beijing 100083, China)
The Electronic Properties of SiC Films Deposited by RF Magnetron Sputtering ZHOU JI-cheng,ZHENG XU-qiang (School of Physics Science and Technology, Central South University, Changsha 410083, Chian)
Research on the Cr Membrane Igniting Resistance in MEMS Solid Propellant Micro-Thruster XU Chao~ 1* ,LI Zhao-ze~2,WAN Hong~1,WU Xue-zhong~2 1. School of Aerospace and Material Engineering, National University of Defense Technology, Changsha 410073,China; 2. School of Mechanical Engineering and Automation, National University of Defense Technology, Changsha 410073,China
Deep Reactive Ion Etching (DRIE) Device in the MEMS Fabrications CHEN Te-chao, YU Qing-rong, GONG Jie-hong, ZHANG Dong-yan,WI Bo,LI Jian-zhi (The 48th Research Institute of CETC ,Changsha 410111,China)
A Multichannel Microprobe for Neural Recordings SUI Xiao-hong, ZHANG Ruo-xin, PEI Wei-hua, LU Lin, CHEN Hong-da (State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors Chinese Academy of Sciences, Beijing 100083, China)
Laminated Photoresist Sacrificial Layer Technology for MEMS ZHANG Yong-hua~ 1,2* , DING Gui-fu~2, JIANG Zheng~2, CAI Bing-chu~2, LAI Zong-sheng~1 1.Department of Electronic Science and Technology, East China Normal University, Shanghai 200062, China; 2.Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China
A Model of Deep-RIE in MEMS Fabrications ZHANG Jian, HUANG Qing-an, LI Wei-hua (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China)
Research for Manufactuuring the Proximal Circular Silicon Membrane Using Anistropic Etching with EPW ZHAO Xiao-feng, WEN Dian-zhong, WANG Tian-qi, REN Hua 1.HLJ Province Key Lab of Senior-Education for Electronic Engineering , Heilongjiang University, Harbin Heilongjiang 150080,China; 2.Major Laboratories of Integrated Circuits, Heilongjiang University, Harbin Heilongjiang 150080,China
PVD Sputtering Technology and It's Application on MEMS WANG Xiong,WU Xue-zhong (College of Mechatronic Engineering and Automation,National University of Defence Technology, Changsha 410073,China)
A Study on Cr Thin Films Depositing and its Wet-Etching LI Zhao-ze~ 1* ,XU Chao~2,WU Xue-zhong~1, WAN Hong~2,LI Sheng-yi~1 1. School of mechatronic engineering and Automation, National University of Defense Technology,Changsha 410073,China; 2. School of Aerospace and Material Engineering, National University of Defense Technology, Changsha 410073,China
Pulse Duration of AFM Induced Oxidation and Si Nano-Fabrication LIU Qing-gang~ 1* , HE Bo-tao~1, ZHANG Chao-yan~1, QI Sen~1, ZHANG Shi-lin~2, HU Xiao-tang~1 1.State key Lab of Precision Measuring Technology & Instrument, Tianjin University, Tianjin 300072,China; 2.Department of Electronic Information Engineering, Tianjin University, Tianjin 300072,China
The Growth and Adhesion Properties Research of the Cu/NiFe Films on the Silicon Substrates ZHANG Tao~ 1,2 , WU Yi-hui~ 1* , ZHANG Ping~1, WANG Shu-rong~1 1.National Key Lab of Applied Optics, Changchun Institute of Optics. Fine mechanics and Physics ,Chinese Academy of Sciences, Changchun 130033,China; 2. Graduate School of the Chinese Academy of Sciences, Beijing 100039,China
TiN Membrane for MEMS Applications YANG Mei~ 1,2 , SHU Qiong~1, CHEN Jing~ 1,2* 1.College of Microelectronics,Beijing University,Beijing 100871,China; 2.State Key Laboratory of Transducer Technology,Chinese Academy of Scieuces,Shanghai 200050,China
Fabrication of Micro/nano Structures Using Mechanical Scratching Method with AFM Tip YAN Yong-da, SUN Tao, DONG Shen (Harbin Institute of Technology, Harbin 150001,China)
Study on Fabrication of 3D Micro-Structure in Polymer Photovoltaic Cells Based on Nanoimprint Lithography Technology YIN Lei , LIU Hong-zhong, DING Yu-cheng, LU Bing-heng (State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China)
Study of Preparation of AlN Thin Films for FBAR Application by RF Sputtering LI Kan, DONG Shu-rong, WANG De-miao (Department of ISEE, Zhejiang University,Hangzhou 310027,China)
Novel Fabrication Technique for Nanogroove Using Ion Beam Etching SHI Ming-fu~ 1,2 ,JIAO Ji-wei~ 2* , BAO Xiao-qing~2,FENG Fei~2, YANG Heng~2,LI Tie~2, WANG Yue-lin~2 1.Graduate University of the Chinese Academy of Sciences; 2.Shanghai Institute of Microsystem and Information Technology State Key Laboratory of Transducer Technology,Shanghai 210000,China
Study on Effects of Heat Transfer Coefficient between Polymer and Mold on Melt Filling Flow in Micro Injection Molding ZHUANG Jian, YU Tong-min,WANG Min-jie Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China
Simulation of the Distribution of the Deep UV Light Intensity in SU-8 PR FENG Ming,HUANG Qing-an,LI Wei-hua,ZHOU Zai-fa, ZHU Zhen (State Ministry Education Key Laboratory of MEMS, Nanjing, 210096,China)
Micro Milling of the Inertial Components with 3D structure WANG Bo, LIANG Ying-chun, SUN Ya-zhou, TAN Ya-ming (Center for Precision Engineering of Harbin Institute of Technology,Harbin 150001,China)
Investigation of Selectively Forming Nano-Porous Silicon for the application of MEA WANG Wen-jing, WANG Xiao-hong, JIANG Yin-qi, HU Xiao-long, LIU Li-tian (Institute of Microelectronics, Tsinghua University, Beijing 100084,China)
Experimental Study on the Uniformity of Micro-Electroforming Based on no Backing Process LIU Hai-jun~ 1,2 ,DU Li-qun~ 1,2* ,QIN Jiang~2, ZHU Shen-miao~2 1.key Laboratory for Precision & non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116023,China; 2. Key Laboratory for Micro/Nano Technology and System of Liao Ning Province, Dalian University of Technology, Dalian 116023,China
The Design and Fabrication of 3D Micro Spring Type MEMS Probe Card JING Xiang-meng, CHEN Di,ZHANG Ye, ZHANG Bao-zeng, LIU Jing-quan, CHEN Xiang, ZHU Jun National Key Laboratory of Nano/Micro Fabrication Technology, Key laboratory for thin film and microfabrication of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China
A Phase Unwrapping Method Based on Template in MEMS/NEMS 3-D Surface Profile Measurement HUANG Yu-bo~1,LI Da-chao~ 1* ,HU Xiao-tang~1,HU Chun-guang~1,ZHANG Wen-dong~2,XU Lin-yan~1 (1.State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China; 2.National Key Laboratory for Electronic Measurement Technology,North University of China, Taiyuan Shanxi 030051,China.
Mechanical Characterization of Nanostructures Using Nanobending-Based Test XU Lin-yan~1,LI Da-chao~ 1,2* ,HU Xiao-tang~1,ZHANG Hai-xia~2,HUANG Yu-bo~1 1.State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China; 2.National Key Laboratory of Micro / Nano Fabrication Technology, Peking University, Beijing 100871, China
Au Surface Mechanical Behavior Research with Electro-Thermo-Mechanical Coupled Action Using Atomic Force Microscope WANG Quan~ 1* , DING Jian-ning~1,XUE Wei~2, YU Peng-qing~1 1. Center of Micro/ Nano Science and Technology, Jiangsu University, Zhenjiang Jiangsu 212013,China; 2. Industrial Engineering School, Wenzhou University, Wenzhou Zhejiang 323035,China
Study on the Performance of Phase-Shifter in the MEMS Microscopic Interferometric Measuring System GUO Tong,HU Chun-guang,CHEN Jin-ping,FU Xing,HU Xiao-tang (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China)
The Method and System for Testing and Calibration of Three-Dimensional Micro Tactile MEMS Sensor ZHAO Da-bo,LI Da-chao,LI Yuan,FU Xing,HU Xiao-tang (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China)
Study on Measurement of Surge Micro-Shape Using Three-Dimensional MEMS Mechanical Quantity Sensor XU Ke-bao~ 1* ,WANG Jun-cheng~2,CHEN Guang-qing~1,GAO Li-li~1,LI Xiao-bo~1 1.Department of Automation Measurement and Control Shandong University of Science and Technology, Qingdao 266510, China; 2.Institute of Oceanographic Instrumentation Shandong Academy of Sciences, Qingdao 266001, China
Structure Design and Optimization of MEMS Micro Tactile Probe for NMM LI Yuan,LI Da-chao,HU Xiao-tang,ZHAO Da-bo,GUO Tong,CHEN Jin-ping (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China)
Measuring MEMS Deep-Trench Structures with White Light Interference XUE Chen-yang,KONG Fan-hua,ZHANG Wen-dong,XIONG Ji-jun,ZHANG Bin-zhen,ZHENG Li-na (National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan 030051, China)
Research on Fusion Measurement System of Grating and Capacitive Grating with Nanometer Resolution MAO Qian-min, LIU An-kun, SHEN Wei-min, ZHANG Zeng-yao (College of Metrology Technology and Engineering, China Jiliang University, Hangzhou 310018,China)
Study on Dimensional Tolerance of SU-8 Photoresist Microstructures QIN Jiang~ 1,2 ,DU Li-qun~ 1,2* ,LIU Chong~ 1,2 ,ZHU Shen-miao~2 1.Key Laboratory for Precision & Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology, Dalian 116023, China; 2.Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology, Dalian 116023, China
A Method for In-Situ Measuring Average Stress Gradient and Equivalent Elastic Modulus of a MEMS Film RONG Hua,WANG Ming (Jiangsu Province Key Laboratory of Optoelectronic Technology, Nanjing Normal University, Nanjing 210097, China)
Research of MEMS Dynamic Testing Based on Comb Silicon Micro-Resonator ZHENG Li-na,XUE Chen-yang,ZHANG Wen-dong,XIONG Ji-jun,ZHANG Bin-zhen,KONG Fan-hua ( Electronic Test & Measurement Technology National Lab(North University of China),Taiyuan 030051, China)
Measurement System for in-situ Extracting Material Parameters of MEMS Thin Film Based on Data Acquisition LI Qiao-ping,LI Wei-hua (Key Lab of MEMS of Education Ministry, Southeast University, Nanjing 210096, China)
Resonance Frequency Measuring Technique of MEMS Microstructures WANG Xiao-dong,WANG Tao,LI Nan,LIU Meng-wei,CUI Yan,WANG Li-ding Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China
The Weak Signal Frequency in Silicon Resonance Microsensor Measurement Based on Heterodyne Stochastic Resonance Method HUANG Yong-mei,LIN Min (College of Metrology Technology and Engineering, China Jiliang University,Hangzhou 310018, China)
Simultaneous Measurements of Thermal Conductivities of Nd:YAG Crystal and SiO_2/ZrO_2 Antireflective Films by 3ω Method WANG Zhao-liang~ 1,2 ,TANG Da-wei~ 1* 1.Institute of Engineering Thermophysics, Chinese Academy of Sciences, Beijing 100080, China; 2.Graduate school of Chinese Academy of Sciences, Beijing 100049, China
Calibration and Handling Strategy of Automated Micro Assembly System WU Jian-hua,WU Ya-lei,CHU Jia-ru (Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China)
A Microactuator with High-Resolution and Large-Stroke Drive Features JIANG Wen-rui , LU Ze-sheng (School of Mechantronic Engineering, Harbin institute of technology, Harbin 150001, China)
Experimental Analysis and Simulation of Microgripper with Flexure Hinge WANG Xu,SHEN Xue-jin,ZHANG Yong-yu (Dep. Of Mechanical and Machine of Shanghai University, Shanghai 200072, China)
Design and Debug of the Measuring Circuits of the Wheel-Type Flow Sensor SUN Ping, ZHANG Lu, WEI Ze-wen, QIN Ming, HUANG Qing-an (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China)
Fast Coding Method for Counter-Meshing Gears Mechanism GAO Yang (Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang Sichuan 621900, China)
Design and Temperature Drift Test of Pulse Modulation Constant Temperature Difference(CTD) Control Circuit of Thermal Flow Sensor DING Gao-fei,QIN Ming,SHEN Guang-ping (MEMS Key Laboratory of Education Ministry at Southeast University, Nanjing 210096, China)
An Microassembly System for Batch Bonding of MEMS Sensors RONG Wei-bin,XIE Hui,SUN Lining (Robotics Institute Harbin Institute of Technology Harbin 150001,China)
An Optimized Accessing Protocol for DS18B20 in Reducing Cycle Time in Large Scale Multi-site Temperature Monitoring CHEN Liang-guang~ 1* ,LI Xiong-jie~2,XU Bin~1 1.Zhejiang Gongshang University Hangzhou 310012, China; 2.Zhenjiang business technology institute Ningbo 315012, China
The Design of Novel Dridge-Connecting Power Amplifier of Audio-Frequency HE Wei-dong, JIANG Ya-dong (School of Opto-Electronic Information,University of Electronic Science and Technology of China, Chengdu 610054, China)
The Analyze of High Performance DC/DC Converter WANG Ning,JIANG Ya-dong (School of Opto-Electronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China)
Finite Element Analysis on Solder Joint Stress of BGA under Shock Load ZHANG Jie,YANG Ping (Micro/Nano Science and Technology Research Center, Jiangsu University, Zhenjiang Jiangsu 212013, China)
A Method for Measuring Mechanical Properties of Permalloy Thin Films LI Xue-ping~ 1, 2 , DING Gui-fu~ 1* , ANDO Taeko~2, SHIKIDA Mitsuhiro~2, SATO Kazuo~2 1 National Key Lab of Nano/Micro Fabrication Technology, Key Lab for Thin Film and Microfabrication Technology of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China; 2 Dept of Micro-Nano Systems Engineering, Nagoya University, Nagoya, Japan
Research on the Fatigue Damage of a Polysilicon Beam YU Cun-jiang~ 1* ,TANG Jie-ying~1 ,EN Yun-fei~2 ,SHI Qian~2 1. Key Laboratory of MEMS Ministry of Education, Southeast University, Nanjing 210096, China; 2. CEPREI, Guangzhou 510610, China
Stiction Reliability Prediction for Polysilicon Micro-Cantilevers under Shock WANG Pei-yao1 ,TANG Jie-ying~1, YU Cun-jiang~1, EN Yun-fei~2, SHI Qian~2 (1. Key Laboratory of MEMS Ministry of Education, Southeast University, Nanjing 210096, China;2. CEPREI, Guangzhou 510610, China)
Study of the Thermomechanical Coupling Effect in COB Packaging Structures LI Ming, HUANG Qing-an, SONG Jing,CHEN Fan-xiu,TANG Jie-ying,Yu Cun-jiang (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China)
A Failure Mode of Micro Mechanical Shock Sensors SUN Yuan-cheng~ 1, 2* ,YANG Bo~2 ,PENG Bo~2 ,ZHAO Long~2 ,ZHANG Qian-mei~2 1 Department of Micro Electronics, Fudan University,Shanghai 200433,China; 2 Electronic Engineering Institute, China Academy of Engineering Physics,Shanghai 200000,China
Analytical Modeling on Thermally Induced Packaging Effect of MEMS Devices SONG Jing, HUANG Qing-an, TANG Jie-ying (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China)
Analysis for Load Limitation of Square Shaped Boron-Doped Silicon Diaphragm XU Chen, SHI Meng-yu, ZHAO Lin-lin, LI Bo, SHEN Guang-di Beijing Optoelectronic Technology Laboratory , College of Electronic Information & Control Engineering, Beijing University of technology, Beijing 100022, China
Mechanical Behavior Experimental Study of Microstructure with Mechatronic Coupling XUE Wei~ 1, 2* , WANG Quan~ 2 , DING Jian-ning~ 2 ,YU Peng-qing~ 2 1. Industrial engineering school, Wenzhou University, Wenzhou Zhejiang 323035,China; 2. Center of Micro/ Nano Science and Technology, Jiangsu University, Zhenjiang Jiangsu 212013,China
The Numerical Value Simulation Studying of Flip-Chip Thermal Stress Under Temperature Impulsion LOU Wen-zhong , MA Ting, YU Xiu-li (School of Mechartonic Engineering, Beijing Institute of Technology, Beijing 100081,China)
Simulation of the Energy Dissipation Mechanisms in Multiwall Carbon Nanotube Oscillators with Molecular Dynamics WANG Xiao-hui~1,BI Ke-dong~1, WANG Yu-juan~1,CHEN Yun-fei~ 1, 2* 1.College of Mechanical Engineering, Southeast University, Nanjing 210096, China; 2.Key Laboratory of MEMS of Education Ministry, Southeast University, Nanjing 210096, China
Molecular Dynamics Simulation of Electroosmotic Flow in Nanotubes WANG Gui-ming~1, CHEN Min-hua~1, YANG Jue-kuan~1, CHEN Yun-fei~ 1,2* 1.College of Mechanical Engineering, Southeast University, Nanjing 210096, China; 2.Key Laboratory of MEMS of Ministry Education, Southeast University, Nanjing 210096, China
Molecular Dynamics Study of Water Molecules Confined in Parallel Si plates CHEN Bo~1,CHEN Yun-fei~ 1, 2* 1.College of Mechanical Engineering, Southeast University, Nanjing 210096, China; 2.Key Laboratory of MEMS of Education Ministry, Southeast University, Nanjing 210096, China
Research on the Computational Method of Van Der Waals Force Between Contacting Faces in Microgear Train YANG Ping, ZHANG Hua-zhong (Center of Micro/Nano Science and Technology, Jiangsu University, Zhenjiang Jiangsu 212013, China)
Molecular Dynamics Simulation of Thermal Response Process of Near-Field Thermal Storage System HUANG Ling-juan~1,WANG Yu-juan~1,CHEN Yun-fei~ 1, 2* 1.College of Mechanical Engineering, Southeast University, Nanjing 210096, China; 2.China Education Council Key Laboratory of MEMS, Southeast University, Nanjing 210096, China
Dynamic Stability of Torsional NEMS Actuators with Casimir Effect GUO Jian-gang, ZHAO Ya-pu (State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080,China)
Research on Friction at the Atomic Scale LUO Bin-bin~1 LI Xiang~1 CHEN Yun-fei~ 2* 1.School of Mechanical Engineering, Southeast Unerversity,Nanjing 210096,China; 2.Key Laboratory of MEMS of Ministry of Education, Nanjing 210096,China
Research on the Nanomechanical Properties of the Zaocys Dhumnades's Ventral Epidermis ZHANG Zhan-li~ 1、2* , YANG Ji-chang~1, DING Jian-ning~1, HU You-yao~1 1.Micro/Nano Science & Technology Center, School of Mechanical Engineering, Jiangsu University, Zhenjiang Jiangsu 212013, China; 2.Henan University of Science and Technology, Luoyang Henan 471003, China
Molecular Dynamics Simulation of the Influence on Nanoscale Fluid Lubrication and Friction of Electric Double Layer WANG Jia-jun~1,LIN Xiao-hui~1,YANG Jue-kuan~1,CHEN Yun-fei~ 1, 2* 1.College of Mechanical Engineering, Southeast University, Nanjing 210096, China; 2.Key Laboratory of MEMS of Education Ministry, Southeast University, Nanjing 210096, China
Analysis of Factors Affecting the Thermal Conductivity of Superlattice Using the Molecular Dynamics Simulation Method HU Han~1,CHEN Min-hua~1, CHEN Yun-fei~ 1, 2* 1.College of Mechanical Engineering, Southeast University, Nanjing 210096, China; 2.Key Laboratory of MEMS of Education Ministry, Southeast University, Nanjing 210096, China
Static Study of Stiction between Rough Surfaces under van der Waals Forces DING J ian-ning,ZHANG Jian,YANG Ping,LING Zhi-yong,FAN Zhen (Center of Micro/Nano Science and Technology, Jiangsu University, Zhenjiang Jiangsu 212013,China)
Molecular Dynamics Simulation on the Thermal Conductivity of AlN thin films YANG Ping,SHEN Min,WANG Ming (Center of Micro/Nano Science and Technology.Jiangsu University,Zhenjing Jiangsu 212013,China)
Moleculer Dynamics Simulation of Thermal Conductivity of Nano-Films in the Direction along the Planes XU Yue-fei,LIAO Heng-cheng (College of Materials Science﹠Engineering,Southeast University, Nanjing 210096 ,China)
Numerical Simulation on Operating Process of Freeze Tweezer for Manipulation of Micro/Nano Objects YANG Yang,LIU Jing (Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100080, China)
Theoretical and Experimental Research on a Novel Data Readout Method for SPM-Based High Density Data Storage XU Xiao-hui, ZHAO Gang, WEN Li, WU Ya-lei,CHU Jia-ru (Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China)
Research on Fluid Flow and Heat Transfer of the V-Shaped Microchannel Heat Sink LIU Ting-ting~ 1, 2* ,GHO Yang~2,HAN Bin~1,HU Li~1 1. Information and Control Engineering College, Southwest University of Science and Technology, Mianyang, Sichuan, 621010,China; 2. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang Sichuan 621900,China
Simulation of Single Crystal Nano-Beam by Molecular Dynamic Method CAO Gong-bai~1, JIAO Ji-wei~ 1* ,CHEN Yun-fei~2, LI Tie~1,YANG Heng~1,Wang Yue-lin~1 1.Shanghai Institute of Microsystem and Information Technology, State Key Laboratories of Transducer Technology, Chinese Academy of Science,Shanghai 200050,China; 2.School of Mechanical Engineering, MEMS Key Laboratory of China Educational Ministry,Southeast University,Nanjing 210096,China
Molecular Dynamics Simulation of the Mechanical Properties of Bio-molecules Adsorption on Ni Nano-film YANG Zhen-yu, ZHAO Ya-pu (State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China)
Theoretical Study on Photo-Induced-Deforming Silicon Microcantilevers GUO Yu-lin, XU Gu-cheng, ZHOU Jia, HUANG Yi-ping,BAO Min-hang (ASIC and System National Key Lab, Department of Microelectrics, Fudan University, Shanghai 200433, China)
Molecular Dynamics Simulation of the Stretching Process of Silicon Nano-Rods FU Chen-xin, CHEN Yun-fei (School of Mechanical Engineering, MEMS Key Laboratory of China Educational Ministry, Southeast University, NanJing 210096,China)
Effects of Fluids with Magnetic Nano-Particles in Y Shape Microchannels on the Mixing Rate LI Zhen-guo~ 1, 2 , LI Zhan-hua 1. LNM, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080,China; 2. Department of Modern Mechanics, University of Science and Technology of China, Hefei 230027,China
Study on Resonance Response of Piezoresistive Double-Clamped Silicon Nano-Beam ZHAO Quan-bin~ 1,2 ,JIAO Ji-wei~ 1* ,YANG Heng~1, LIN Zi-xin~1,LI Tie~1,ZHANG Ying~1,WANG Yue-lin~1 1.S tate Key L aboratory of Trans ducer Technology , S hanghai I nsti tute of Micros ystem and Inf ormat ion Technology, Chinese Academy of Sciences , Shanghai 200050 , China; 2.Graduate School of the Chinese Academy of Sciences , Beijing 100039 , China
Study on Controllable Wettability of Roughness Surfaces ZHU Liang~ 1,2 ,FENG Yan-ying~ 1,2* ,YE Xiong-ying~ 1,2 ,WU Yan-bin~1 ,ZHOU Zhao-ying~1 1.Dept. Precision Instruments & Mechanology, Tsinghua University; 2. State Key Laboratory of Transducer Technology, Bejing 100084,China
Static Analysis for the Si Nanoscaled Clamped Beam BAO Fang, YU Hong, HUANG Qing-an (Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China)
A CMOS Compatible PMOS Transistor Infrared Detector WANG Ming-zhao~1, YU Feng-qi~2, GAO Shu-qin~ 1* 1. Jilin University, Changchun Jilin 130025, China; 2. RF Department, Suzhou CAS IC Design Center, Suzhou Jiangsu 215021, China
Thermal and Optical Analysis of Amorphous Silicon Micro-Bolometer LI Shi-bin, WU Zhi-ming, JIANG Ya-dong, LI Wei,LIAO Nai-man School of Optoelectronic Information, State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China(UESTC), Chengdu 610054,China
New Type of Uncooled Infrared Detector with Polyimide Thermal-Isolation Structure LIU Xing-ming,HAN Lin,LIU Li-tian ( Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
Performance Analysis of Microbolometer Microbridge Structure LI Su, WU Zhi-ming, JANG Ya-dong,YANG Xiao-yu,LI Shi-bin (School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China)
Low Cost MEMS Variable Optical Attenuator for Optical Telecommunication Application LI Hai-jun ~ 1,2* ,YANG Yong-jun~1, WANG Jian-jun~3,XU Yong-qing~1,ZHENG Qi-long~1,CHEN Wei-you~2 1.The 13th Research Institute, CETC, Shijiazhuang 050051, China; 2.College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130023, China; 3.China Academy of Engineering Physics, Research Center of Laser Fusion, Mianyang 621900, China
Optimized Design for a PI-Cantilever Electromagnetic Actuation MOEMS Optical Switch KONG Qing-feng~ 1,2 ,LIANG Jing-qiu~ 1,2* ,ZHONG Yan-chao~ 1,2 ,HOU Feng-jie~ 1,2 ,LI Jia~ 1,2 ,SUN De-gui~1 1. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130031, China 2.Graduate School of Chinese Academy of Science, Beijing 100039,China
The Design of the Subwavelength Wire-Grid Polarizers Based on Rigorous Couple-Wave Theory ZHANG Na ,CHU Jin-kui ,ZHAO Kai-chun ,MENG Fan-tao 1.Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education ,Dalian University of Technology , Dalian 116024; 2.Research Center of Microsystems of Technology , Dalian University of Technology , Dalian 116024
A Novel Variable Optical Attenuator Based on PDLC ZHONG Zhi-cheng~ 1,2 ,LIU Cai-xia~1,ZHANG Xin-dong~1,WANG Ming-feng~1, TANG Yong~1, JIA Cui-ping~1, XUE Hai-lin~1,CHEN Wei-you~1* 1.College of Electronic sciences & Engineering, State Key Laboratory on Integrate Optoelectronics, JiLin University, Changchun 130012,China; 2.College of computer sciences & technology, JiLin University , Changchun 130012,China
Variable-Focus Liquid Microlens Based on Electrowetting on Dielectric OUYANG Fan, WU Jian-gang, KANG Ming, YUE Rui-feng, LIU Li-tian (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
Novel MEMS Torsion Micromirror with Compound Driving Structures LI DA-chao~ 1, 2* , WU Wen-gang~2, YUAN Yong~1, CHEN Qing-hua~1, HAO Yi-long~1, HU Xiao-tang~2 1.Institute of Microelectronics, Peking University, Beijing 100871, China 2.State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University, Tianjin 300072,China
Micro Programmable for Synthesizing Spectra Grating and the Application Research AN Fei, YUAN Wei-zheng, QIAO Da-yong, QING Chong (Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an 710072, China)
Research on Cold Characteristics of Bulk Micromachined Folded Waveguide Slow-Wave Structure ZHU Zheng-peng~ 1,2* , MIAO Min~ 2,3 , QU Bo~4, JIN Yu-feng~2, FENG Jing-jun~4 1. Shenzhen graduate school of Peking University, Guangdong Shenzhen 518055, China; 2. National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing 100871, China; 3. Information and Telecom Engineering Dept., Beijing Information Technology Institute, Beijing 100101, China; 4. Vacuum Electronics National Lab,Beijing Vacuum Electronics Research Institute, Beijing 100016, China.
System-Level Design of Segmented Piston-like Micro Deformable Mirrors YU Yi-ting, YUAN Wei-zheng, QIAO Da-yong, LI Xiao-ying (Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi' an 710072, China)
A Wavelength Scanning Method for Measuring Micro Distance of Grating Moving Light Modulator ZHANG Jie,HUANG Shang-lian,ZHANG Zhi-hai,SUN Ji-yong (the Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry, Chongqing University, Chongqing 400030,China)
Conical Tube Employed Variable-Focus Liquid Lens Based on EWOD KANG Ming, YUE Rui-feng, WU Jian-gang, OU YANG Fan, LIU Li-tian (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
Si-Based Ge Quantum Dot Infrared Photodetectors with Si_3N_4 as Anti-Reflection Coating WEI Rong-shan~ 1* ,DENG Ning~1,WANG Min-sheng~1,ZHANG Shuang~1,CHEN Pei-yi~1,LIU Li-tian~1,ZHANG Jing~2 1. Institute of Microelectronics, Tsinghua University, Beijing 100084, China; 2. Blackett Laboratory, Imperial College of Science and Technology and Medicine, London, UK
Luminescent Study of Eu-Doped γ-LiAlO_2 Phosphor YANG Xue-feng, NING Gui-ling, LIN Yuan (State Key Laboratory of Fine Chemicals and School of Chemical Engineering, Dalian University of Technology, Dalian 116012,China)
Infrared Absorbance of SiN_x and SiC WANG Xin, YU Xiao-mei, TIAN Da-yu (Institute of Microelectronics Peking University,Beijing 100871,China)
Design of Linear CCD Driving Circuit with Tunable Integration Time Based on the CPLD JI Xian-ju, WEN Zhi-yu Key Laboratory for Opto-Electronic Technology & Systems of Ministry of Education, Micro-System Research Center, Chongqing University, Chongqing 400044, China
Design of USB Interface Special Driver Program for Micro-Spectrometer Based on Linux System XIAO Yong*,WEN Zhi-yu, HONG Ming-jian College of OptoElectronic 0 Engineering, Key Laboratory for Opto-Electronic Technology & Systems ofMinistryof Education , Micro-System Research Center , Chongqing University, Chongqing400044, China
Study of the Bionic Test System for Polarized Light Based on ARM LIU Li-bing~1 , JIN Ren-cheng~ 1* , ZHAO Kai-chun~2 , Yao Hong-yi~2 1.Research Center of Microsystems of Technology , Dalian University of Technology , Dalian 116024,China; 2.Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology,Dalian 116024,China
Preparation of PZT Films on Optical Fiber by Sol-ESD Method WU Ya-lei, WU Jian-hua, CHU Jia-ru (Department of Precision Machinery and Precision Instrumentation, USTC, Hefei 230027,China)
Simulation on Coupling Characteristic of Micro Optical Switch in Laser Ignition System ZHAO Xing-hai,GAO Yang,CHENG Yong-sheng (Institute of electronic engineering,China Academy of Engineering Physics,Mianyang Sichuan 621900,China )
Study on Ionization Effect of PHEMT YANG Guang-lin~ 1* ,DU Lei~1,ZHUANG Yi-qi~2,HE Liang~1,HU Jin~1,LIU Yu-an~1 1.Institute of Technology Physics, Xidian University , Xi'an 710071,China; 2.Microelectronic Institute, Xidian University , Xi'an 710071,China
Electrospun Aligned Polyethylene Oxide Nanofibers WU De-zhi, SUN Dao-heng (Dept. of Mechanical & Electrical Engineering, Xiamen University, Xiamen Fujian 361005, China)
Temperature Affect of the Micro Capacitive Pressure Sensor HUANG Zhe-lin~1,FENG Yong-jian~ 2* 1.Dept. of Electronic Engineering, Xiamen University, Xiamen Fujian 361005,China; 2.Dept. of Electronic-Mechanical Engineering,, Xiamen University, Xiamen Fujian 361005,China
Piezoresistive Properties of Poly-Si Nanofilms Deposited at Different Temperatures CHUAI Rong-yan~ 1,2* , LIU Xiao-wei~1, PAN Hui-yan~1, WANG Wei~1, ZHANG Ying~1 1. MEMS Center, Harbin Institute of Technology, Harbin 150001, China; 2. Information science and Engineering school, Shenyang University of Technology, Shenyang 110023, China
Design and Fabrication of Silicon Integrated Sensor Chip Used for TPMS ZHANG Zhao-hua~ 1* , LIU Bing-wu~1, ZHANG Yan-hong~1, TAN Zhi-min~2, LIN Hui-wang~2, LIU Li-tian~1 1. Institute of Microelectronics, Tsinghua University, Beijing 100084, China; 2. Yangtze Delta Institute of Tsinghua University, Zhejiang 314001, China
Research on Capacitive Pressure Sensors Based on Flip-Chip Technology ZHOU Wei, QIN Ming (Key Laboratory of MEMS of Ministry of Education, Southeast University,Nanjing 210096,China)
Design and Fabrication of a Novel Silicon Piezoresistive Pressure Microsensor for TPMS ZHANG Yan-hong, LIU Bing-wu, LIU Li-tian, ZHANG Zhao-hua, TAN Zhi-min, LIN Hui-wang (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
A Design for Monolithic Pressure Sensor Amplifier Circuit ZENG Peng~ 1* ,ZHANG Zheng-yuan~2 1.College of Electronic Engineering Chong Qing University of Posts and Telecommunications,Chongqing 400065,China; 2.National Laboratory of Analog Integrated Circuits,Sichuan Institute of Solid-State Circuits,CETC,Chongqing 400060,China
The Analyses and Optimization of Micro-Type High Temperature Pressure Sensor Chip ZHAO Yan-ping~ 1* , DING Jian-ning~1 , YANG Ji-chang~1 ,WANG Quan~1, XUE Wei~ 1,2 1.Centre of Micro/Nano Science and Technology, Jiangsu University, Zhenjiang Jiangsu 212013, China; 2. Wenzhou University, Wenzhou Zhejiang 323035, China
A Novel Fabry-Perot MEMS Fiber Pressure Sensor Based on Intensity Demodulation Method Interferometry GE Yi-xian, WANG Ming, CHEN Xu-xing,LI Ming (Opto-electronic Technology Key Lab, Department of Physical Science and Technology, Nanjing Normal University, Nanjing 210097, China)
Design and Finite Element Analysis of a Magnetically Actuated Silicon Resonant Beam PAN Jun,HUANG Qing-an,QIN Ming (Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096, China)
Modeling of Capacitive Micro Pressure Sensor Featuring Space-Continuous Behavior ZHANG Cheng-liang,MA Bing-he,CHANG Hong-long,YUAN Wei-zheng (Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi’an 710072, China)
A GaAs Pressure Sensor Based on Resonant Tunneling Diodes WANG Jian,ZHANG Wen-dong,XUE Chen-yang,XIONG Ji-jun,ZHANG Bin-zhen,TONG Zhao-min (National Key Laboratory For Electronic Measurement Technology,North University of China, Taiyuan 030051, China)
A Batch Microassembly System for Fabrication of MEMS Pressure Sensors RONG Wei-bin,CHEN Li-guo,SUN Li-ning,XIE Hui (Robotics Institute Harbin Institute of Technology,Harbin 150001,China)
The Influence of Stress on Mechanical Performance of Highly Doped Square-Shaped Silicon Diaphragm SONG Yi-chao,XU Chen,ZHAO Lin-lin,LI Bo,SHEN Guang-di Beijing Optoelectronic Technology Laboratory , College of Electronic Information & Control Engineering, Beijing University of technology, Beijing 100022, China
A Diaphragm Design of Microfabircated Resonant Pressure Sensor REN Sen,YUAN Wei-zheng,DENG Jin-jun (MEMS/NEMS Laboratory, Northwestern Polytechnical University, Xi'an 710072, China)
Development of MEMS Capacitance Sensor Based on Pressure Artificial Denture HU Hong-ping, LING Yan-fei, FENG Yong-jian (Dep. Of Mech. & Elect. , Xiamen University, Xiamen Fujian 361005,China)
Design of A Novel CMOS Capacitive Absolute Pressure Sensor LIU Na,HUANG Qing-an,QIN Ming (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China)
The Influence of the Thermal Stress on a Pressure Sensor in Integrated Weather Multi-Sensor Chip YAO Su-yu, QIN Ming, HUANG Qing-an (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096,China)
A Matlab-Based Simulation of Pressure Control for Micro Gas Pressure Sensor Testing System CHEN Tao~1,JIN Ren-cheng~ 2* ,ZHANG Feng-tian~2,WANG Hong-bin~1 1.Research Center of Microsystems of Technology , Dalian University of Technology, Dalian 116024, China; 2.Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education ,Dalian University of Technology, Dalian 116024, China
A Novel Fabry-Perot MEMS Fiber Pressure Sensor Based on Phase Demodulation Method CHEN Xu-xing,WANG Ming,RONG Hua,GE Yi-xian (Department of Physics, Nanjing Normal University, Nanjing 210097, China)
The Design and Simulation of the RF Solenoid Microinductor FANG Dong-ming,ZHAO Xiao-lin,WANG Xi-ning,ZHOU Yong National Key Laboratory of Nano/Micro Fabrication Technology Key Laboratory for Thin Film and Microfabrication of Ministry of Education Research Institute of Micro/Nano Science and Technology,Shanghai Jiao Tong University, Shanghai 200030, China
Analysis and Design of Capacitive Switches for Distributed RF MEMS Phase Shifters HE Xun-jun~ 1,2 ,WU Qun~ 1* ,JIN Bo-shi~1,SONG Ming-xin~2,YIN Jing-hua~2 1.School of Electronics and Information Technology, Harbin Institute of Technology, Harbin 150001, China; 2.School of Applied Sciences, Harbin University of Science and Technology, Harbin 150080, China
A Novel Design for the Miniaturization of the DMTL Phase Shifter JIN Bo-shi~ 1* ,WU Qun~1,HE Xun-jun~ 1,2 ,TANG Kai~1,YANG Guo-hui~1,Jong-chul Lee~ 1,3 1.Dept. of Electronic & Communications Engineering, Harbin Institute of Technology, Harbin 150001, China; 2.School of Applied Sciences, Harbin University of Science and Technology, Harbin 150080, China; 3.School of Electronic Engineering, Kwangwoon University, Seoul Korea
K Band Silicon Monolithic MEMS Resonator YU Yuan-wei,ZHANG Yong,ZHU Jian,JIA Shi-xing,CHEN Chen 1.Nanjing Electronic Devices Institute, Nanjing 210016, China; 2.Dept. of Physics, Nanjing University, Nanjing 210093, China
IntelliSuite~ EMagAnalysis:an S-Parameter Extraction Tool for Real Deformed Structures XU Fan,ZHANG Shan-liang,ZHOU Lei,XU Bo (Jiangsu IntelliSense Science and Technology Co. Ltd.Nanjing 210025,China)
The Application of Polyimide(PI) in the Manufacture Process of RF MEMS Capacitive Shunt Switch PENG Hui-yao~1,YU Ying~1,LUO Zhong-zi~2,WANG Pei-seng~1 1.Department of Electronic Science and Applied Physics,Fuzhou University,Fuzhou 350002, China; 2.SA Pen-tung Microelectromechanical Systems Research Center,Xiamen University,Xiamen 360005, China
A Novel X-Bands RF MEMS Switch with Enhanced Power Handlings DONG Qiao-hua, LIAO Xiao-ping (Key Laboratory of MEMS of Ministry of Education, Southeast University, nanjing 210096, China)
Sputtering BST Films with Substrate Synchronous Heating ZHANG Long,LIN Li-qiang,ZHU Jian,ZHUO Min (Nanjing Electronic Devices Institute, Nanjing 210016, China)
Development of a RF MEMS Voltage Controlled Oscillator and its Phase Noise Characteristic LI Li,ZHANG Zhi-guo,ZHAO Zheng-ping,GUO Wen-sheng (The 13th Research Institute of CETC , Shijiazhuang Hebei 050051,China)
Simulation and Analysis of the Resonant Properties of FBARs TANG Liang,HAO Zhen-hong,QIAO Dong-hai (MEMS laboratory of the Institute of Acoustics, Chinese Academy of Sciences, Beijing 100080, China)
Design of Integrated Photonic RF Phase Shifter Based on Polymer Waveguide and PDLC DONG Wei~ 1,2* , LIU Cai-xia~2, ZHANG Xin-dong~2, RUAN Sheng-ping~2, ZHOU Jing-ran~2 , JIA Cui-ping~2, WANG Li-jun~1, CHEN Wei-you~2 1.Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033,China; 2.College of Electronic sciences & Engineering, State Key Laboratory on Integrate Optoelectronics, Jilin University, Changchun 130012,China
Theoretical Analysis and Experimental Study of a Planar Type MEMS Electromagnetic Actuator YANG Hao-yu,ZHAO Xiao-lin,DAI Xu-han,SHAO Guo-cheng,DING Gui-fu National Key Laboratory of Nano/Micro Fabrication Techmology,Key Laboratory for Thin Film and Microfabrication of Ministry of Education,Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University,Shanghai 200030,China
Effect of FBAR Electrode Shape on Transverse Coupling wave WU Bi-yan (College of Computer Sci. & Info. Eng., Zhejiang Gongshang University, Hangzhou 310015,China)
Study of preparation of AlN Thin Films for FBAR Application by RF Sputtering DONG Shu-rong, WANG De-miao (Department of ISEE, Zhejiang University,Hangzhou 310027,China)
On-Chip Integrated Inductors with Ferrite Thin-Films for RF IC YANG Chen, LIU Feng, REN Tian-ling, LIU Li-tian (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
Design and Simulation of On-Chip RF Magnetic Medium Inductors ZHANG Fan,YANG Chen,LIU Feng, REN Tian-ling, LIU Li-tian (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
Analytical Modeling and Optimal Design of A Novel MEMS Microwave Power Sensor HUANG Cong-chao, HUANG Qing-an, LIAO Xiao-ping (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096,China)
Model and Analysis of Electromagnetic Wave Radiated During Switching from Capacitive RF MEMS Switches YUAN Xiao-lin, HUANG Qing-an, LIAO Xiao-ping (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096,China)
On RF Characterization and Modeling of RF MEMS Bonding Wire Interconnection WU Han-qin, LIAO Xiao-ping (Key Laboratory of MEMS Ministry of Education, Southeast University, Nanjing 210096, China)
Dielectric Charging Effects on Capacitive RF MEMS Switches WU Yin-feng,WAN Jiang-wen,YU Ning (Measuring & Communication and MEMS Center,Beijing University of Posts and Telecommunications, Beijing 100876, China)
Design and Preparation High Efficiency Thin-Film Transformer at 200MHz ZHENG Liang,QIN Hui-bin,HU Ji,XU Jun-ming,YE Li-yun,LIU Jian (School of Electronic & Information, Hangzhou Dianzi University, Hangzhou 310018, China)
Development of Planar Coils Based on Micromolding Replication Techniques LIU Bo~ 1,2 ,WU Yi-hui~ 1* ,ZHANG Ping~1 1.The State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 2.Postgraduate Institute of Chinese Academy of Sciences, Beijing 100039, China
Study on Mechanical Property of Silicon Nitride Thin Film and the Application in RF MEMS Switches YU Ying~ 1* ,WU Qing-xin~1,LUO Zhong-zi~2 1.Depantment of Electronic Seience and Applied Physics,Fuzhou University,Fuzhou 350002,China; 2.SA Peng-tung Microelectromechanical Systems Research Center,Xiamen University,Xiamen 360005,China
Research on the Integrated Micro-Fluidic Chip LIU Xiao-wei, WANG Wei, TIAN Li, FU Jian-qi,CHEN Xia-jie, NI He-nan, ZENG Juan (MEMS center, Harbin Institute of Technology, Harbin 150001,China)
Performance of a Serial piezoelectric Micropump CUI Qi-feng~ 1* , LIU Cheng-liang~1, Xuan F. (William) Zha~ 2, 1 1.School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200030 ,China; 2.National Institute of Standards and Technology and University of Maryland at College Park Gaithersburg,MD 20899, USA
A new 3-D Nanogap Electrode Grid Array Biosensor Based on NEMS and Critical Problems on Fabrication LIU Yong-hong~ 1,2* , ZHAO Zhan~1 1.the State Key Laboratory of Transducer Technology, Chinese Academy of Sciences institute of Electronics,BeiJing 100080, China; 2.Graduate University of Chinese Academy of Sciences, Beijing 100039, China
System-Level Modeling for Electrokinetic Passive Micromixers LI Hong-wei, YUAN Wei-zheng,YE Fang (MEMS Laboratory, Northwestern Polytechnical University, Xi’an 710072, China)
Study on Contatless Conductivity Detector for Electrophoresis Microchip ZHU Wei-wei, WEN Zhi-yu, XU Yi (College of Opto-Electronic Engineering, Chongqing University, Chongqing 400044, China)
Bio MEMS Microfluidic Chips for Blood Sample Pretreatment CHEN Xing, CUI Da-fu, LIU Chang-chun, LI Hui (State Key Lab. of Transducer Tech., Inst. of Electronics, Chinese Academy of Sciences, Beijing 100080, China)
Study of Microchip Analytical System with Micro-Nano Monolithic Silica Column as Pretreatment Functional Part XU Yi~ 1,2* , ZHANG Jian~ 1,2 ,ZHANG Zhong-feng~1, WEN Zhi-yu~2 1.Chemistry and Chemical Engineering College, Chongqing Univ.,Chongqing 400030,China; 2.Photo-electric Tech.& System Key Lab of Chinese Educational Committee, Chongqing 400030,China
The Simulation and Optimization on AC Electro Hydrodynamic Pumping in Microchannels ZHANG Shan-liang~ 1* , Nithin Narayanan~2, XU Bo~1 (1.Jiangsu IntelliSense Science and Technology Co. Ltd;Nanjing 210025,China; 2. IntelliSense Corporation, USA)
A New High-Speed Excimer Laser Micromachining Method for PMMA Based Capillary Electrophoresis Chip LIU Ying~ 1* , YAO Li-ying~1,REN Kang-ning~2, WU Jian~1,LIU Shi-bing~1,LUO Guo-an~2, CHEN Tao~1 1.College of Laser Engineering, Beijing University of Technology, Beijing 100022,China; 2.Department of Chemistry, Tsinghua University, Beijing 100084,China
Simulation of Plastic Flow in Microchannel Figuration of Microfluidic Chip Under Hot Embossing WEI Yuan-jie~ 1, LIU Chong~ 1* , LI Jing-min ~1, PENG Jia ~2, ZHU Lian-yi ~2 1 Key Laboratory for Micro/Nano Technology and System of Liao Ning Province, Dalian University of Technology, Dalian 116023,China; 2 Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology,Dalian 116023,China
Transient Elastic Thermal Stress Analysis for Laser Machining Polymer Microchannels XIANG Heng-fu, FU Jian-zhong, CHEN Zi-chen (Mechanical engineering Dept. Micro-system research and development center, Zhejiang University, Hangzhou 310027,China)
Finite Element Analysis of Temperature Effect in Polymer Hot Embossing XU Min~1 , LUO Yi~ 1* ,WANG Xiao-dong~1 , LI Nan~2 , LIU Chong~2 1.The Key Laboratory for Dalian University of Technology Precision & Non-traditional Machining of Ministry of Education, Dalian 116023, China; 2.The Key Laboratory for Micro/Nano Technology and System of Liao Ning Province, Dalian 116023, China
Research and Fabrication of a Bi-directional Piezoelectric Micropump WANG Wei,TIAN Li,BAO Zhi-yong,LIU Xiao-wei,WANG Xi-lian,YANG Song-tao (MEMS Center,Harbin Institute of Technology,Harbin 150001,China)
Numerical Stimulation on Operating Process of Ice Valve for Controlling Micro/Nano Fluidics YANG Yang ,LIU Jing (Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100080, China)
Thermal Performance of High Heat Flux Micro Heat Sinks JIANG Jie, HAO Ying-li (College of Energy and Environment, Southeast University, Nanjing 210096, China)
Assembling Carbon Nanotubes Based on DEP and Fluid Driving TAN Miao-miao, YE Xiong-ying, WANG Xiao-hao, ZHOU Zhao-ying State Key Laboratory of Precision Measurement Technology and Instruments,Dept. of Precision Instruments and Mechanology, Micro-Nano Technology Research Center.Tsinghua University, Beijing 100084, China
An Experimental Study on Dryout Characteristics under Boiling Conditions in Open Capillary Microgrooves HU Xue-gong , TANG Da-wei (Institute of Engineering Thermophysics, Chinese Academy of Sciences, Beijing 100080, China)
Fabrication of Glass Microfluidic Chip by Laser Direct Writing and Wet Etching LIU Xiao-qing ,HAO Wei-wei, GAO Wei-wei, ZHOU Yong-liang Department of Chemistry and The Key Laboratory for Chemical Biology of Fujian Province, College of Chemistry and Chemical Engineering, Xiamen University,Xiamen Fujian 361005,China
Design of a Novel Silicon Capacitive Flow Sensor WEI Ze-wen , QIN Ming , HUANG Qing-an (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096,China)
Simulation and Optimized Design with CFD Software about the Track Effect on the Microchip Electrophoresis TIAN Li, LIU Xiao-wei, WANG Wei, HU Zi-jie (MEMS Center, Harbin Institute of Technology, Harbin 150001, China)
The Theoretic Calculation and Experiment Confirmation of the Driving Voltage of the Tunneling Magnetometer TANG Xue-hua~ 1* , YOU Zheng~2,HU Xiao-li~2 1.School of Mechanical Engineering, Shanghai Dianji University, Shanghai 200245, China; 2. Dept. of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China
Research Fabrication of Spinning Valve Multilayer Membrane GMR WEN Dian-zhong Major Laboratories of Integrated Circuits, Heilongjiang University, Harbin 150080,China; HLJ Province Key Laboratories of senior-education for Electronic Engineering, Heilongjiang University, Harbin 150080,China
Study on the Effects of Shape Parameters on MEMS Hall Device Properties SONG Ming-xin~ 1* , GONG Chun-qing~1, HE Xun-jun~1, YIN Jing-hua~1, LIU Xiao-wei~2 (1. School of Applied Sciences, Harbin University of Science and Technology, Harbin 150080,China ; 2.Harbin Institute of Technology, Center of MEMS, Harbin 150001,China )
Exchange Coupling and Magnetic Properties of SmTbFeCo/Cr/TbFeCo Trilayers with Perpendicular Anisotropy WANG Xiang , SU Shen-wei (Department of Electronic Science and Technology, Beihang University, Beijing 100083,China)
Study on the Structure of Spin Valve for GMR Sensor with Low Coercivity LIU Peng, LI Wei, LIU Hua-rui, YE Shuang-li, REN Tian-ling, LIU Li-tian (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
Fabrication of GMR Linear Sensor Based on Spin Valve LI Wei, LIU Hua-rui, LIU Peng, REN Tian-ling ,LIU Li-tian (Institute of microelectronics, Tsinghua University, Beijing 100084, China)
Modeling of a Novel Magnetometer with High Sensitivity and Low Power Consumption LIU Yu-fei~ 1,2* , ZHAO Ben-gang~ 1,2 , WU Ya-ming~1, WANG Yue-lin~ 1,3 1.State Key Laboratory of Transducer Technology, National Key Laboratory of Microsystem technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; 2.Graduate School of the Chinese Academy of Sciences, Beijing 100039, China; 3.Zhejiang University, Hangzhou 310027, China)
Glucose Concentration Detecting Technology Based on Miniature Surface Plasmon Resonance Biological Sensor HUANG Xian,LI Da-chao,XU Ke-xin,YU Hai-xia,HUANG Fu-xiang,HU Xiao-tang (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China)
Study of glucose and Uric Acid Biosensors Based on Screen-Printed Carbon Paste Electrodes Modified by Carbon Nanotubes WANG You~1,XU Hui~2,LI Guang~ 2* 1.Department of Biomedical Engineering, Zhejiang University, Hangzhou 310027, P.R. China; 2.Institute of Advanced Process Control, Zhejiang University, Hangzhou 310027, P.R. China
DMMP Gas Sensitivity of QCM Based on PVDF Films YING Zhi-hua,JIANG Ya-dong,WANG Hua,XIE Guang-zhong,DU Xiao-song State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, China
Gas-Sensing Properties and Structure of Pd/SnO_2/SiO_2/Si Integrated Thin Films WANG Lei~ 1* ,DU Jun,MAO Chang-hui,YANG Zhi-min,XIONG Yu-hua (Advanced electronic materials institute, General research institute for nonferrous metals, Beijing 100088, China)
Study on Preparation and Sensing Mechanism of Reconstitution Nano-Lipiod Biomembranes LIU Sheng-ping,CHEN Guo-ming,WEI Yun-long,GAO Ying (College of Bioengineering, Chongqing Institute of Technology, Chongqing 400050, China)
A Portable System for Determination of Hemoglobin Based on Optic Biosensor ZHOU Ai-yu~ 1,2 ,YUE Wei-wei~ 1,2 ,HE Bao-shan~ 1,2 ,LIU Chun-xiu~ 1,2 ,YANG Qing-de~ 1,2 ,CAI Xin-xia~ 1,2* 1.State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Science, Beijing 100080, China; 2.Graduate School of Chinese Academy of Science, Beijing 100080, China
Development of Explosive Detection with MEMS KONG De-yi,ZHU Jian-bin,QI Yong-guang,LIN Bing-tao,ZHANG Zheng-yong,ZHANG Tao,LU Wei (Institute of Intelligent Machines,Chinese Academy of Sciences State Key Laboratory of Transducer Technology,Hefei 230031, China)
Human Health Parameters Acquisition SYSTEM Based on MEMS and Radio Frequency Network YU Hai-qian,LIAO Hai-yang,WANG Han (Key Laboratory of Optoelectronic Technology and Systems,Minister of Education,Chongqing University,Chongqing 400044, China)
The Facture and Performance Study of Cl_2 Sensor Based on Laser Micro-Machining on Al_2O_3 Microstructure SHI Yun-bo,ZHANG Hong-quan,HU Zhu-ping,FENG Qiao-hua,XIANG Jin-juan,GUO Jian-ying Harbin University of Science and Technology Observation and control technology and communication engineering college Harbin, Hei Longjiang 150080, China
Study of a Novel Magnetic Bead-Based Microchip for DNA Analysis WANG Yu-ji~ 1,2 ,CHEN Xiang~3,WANG Bin~ 1,2 ,JIN Qing-hui~1,ZHAO Jian-long~ 1* 1.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; 2.Graduate University of Chinese Academy of Science,Beijing 100039, China; 3.Shanghai Jiaotong University, Shanghai 200052, China
QCM Gas Sensor Based on Modified Zeolite for the Nerve Agent Simulant DMMP Detection YANG Juan-juan~1,REN Nan~2,ZHOU Jia~1,ZHANG Ya-hong~2,LIU Quan~1,HUANG Yi-ping~ 1* ,TANG Yi~2 1.ASIC and System National Key Lab, Department of Microelectrics, Fudan University, Shanghai 200433, China; 2.Department of chemistry, Fudan University 220 Handan Road, Shanghai 200433, China)
Study of Carbon Nanotubes Gas Sensor Based on Stochastic Resonance WU Li-li~1,HUI Guo-hua~1,PAN Min~1,CHEN Yu-quan~ 1* ,ZHANG Xiao-bin~2 1.College of Biomedical Engineering and Instrument Science, Zhejiang University, Hangzhou 310027, China; 2.College of Materials Science and Chemical Engineering, Zhejiang University, Hangzhou 310027, China
The Study of Stochastic Resonance in Carbon Nanotubes Ionization Gas Sensor HUI Guo-hua,WU Li-li,PAN Min,CHEN Yu-quan,ZHANG Xiao-bin (Department of Biomedical Engineering, Zhejiang University, Hangzhou 310027, China)
The Effects of Panax on Gene Expression Profile of Aging Mice Brain Based on the cDMA microarray YE Fang,YUAN Wei-zheng,WANG Yu-Bo (MEMS/NEMS Laboratory,Northwestern Polytechnical University,Xi’an 710072,China)
Love Wave Sensor and the Measurement of Mass Sensitivity HU You-wang~ 1,2 ,SHI Jian-liang~ 1,2 ,JIA Hong-guang~1,WU Yi-hui~ 1* 1.The State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 2.Postgraduate Institute of Chinese Academy of Sciences, Beijing 100039, China
Study of VOCs Sensing Property of Carbon Nanotubes and Their Modified Nano-Composites FANG Xiang-sheng~1,GUO Miao~1,CHEN Wen-ju~1,PAN Min~1,CHEN Yu-quan~ 1* ,ZHANG Xiao-bin~2 1.Department of Biomedical Engineering, Zhejiang University, Hangzhou 310027, China; 2.Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
Study on Micro Bi-Bridge Catalyzed LPG Transducer Technology Based on MEMS ZHANG Hong-quan~ 1,2* ,SHI Yun-bo~1,GUO Jian-ying~1 1.School of Measurement-Control Technology and Communications Engineering, Harbin University of Science and Technology, Harbin 150080, China; 2.China electronics technology group corporation No.49th research institute,Harbin 150001, China
Synthesis and H_2S Gas Sensing Properties of SmFeO_3 Nano-sized Powder WANG Huan-xin~1,XU Jia-qiang~ 1,2* ,CHENG Zhi-xuan~2,PAN Qing-yi~2 1.College of Material and Chemical Engineering, Zhengzhou Institute of Light Industry, Henan Zhengzhou 450002, China; 2.College of Science, Shanghai University, Shanghai 200444, China
The Research on the Gas Sensor Based on LAPS and Nanometer Porous Silicon ZONG Xiao-lin,CAI Hua,YU Hui,WANG Ping Department of Biomedical Engineering, Biosensor National Special Laboratory, Key Laboratory of BME of National Education Ministry, Zhejiang University, Hangzhou 310027, China
Microprobe Based on MEMS and Its Detection of the Neurotransmitter in the Olfactory Mucosa LIU Qing-jun~1,XU Ying~1,CAI Hua~1,WANG Ping~ 1* ,Simon Ang~2 1.Biosensor National Special Laboratory, Department of Biomedical Engineering, Key Laboratory of Biomedical Engineering of National Education Ministry, Zhejiang University, Hangzhou 310027,China; 2.Department of Electronic Engineering, University of Arkansas, Fayetteville, AR 72701, USA
Micro Electrochemical Immunosensor Based on Micro/Nano Fabrication Technology XU Yuan-yuan,BIAN Chao,CHEN Shao-feng,XIA Shan-hong (State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China)
Study of Micro Direct Methanol Fuel Cell Plate Configuration ZHANG Yu-feng,LIU Xiao-wei,WANG Xi-lian,WANG Wei,SUO Chun-guang (Harbin Institute of Technology MEMS Center, Harbin 150001, China)
Modeling and Optimized Design for the Cathode of MEMS μPEMFC DONG Pei-tao~ 1,2 ,LI Xin-xin~ 1* ,CHEN Cong~1,XIA Bao-jia~1,WANG Yue-lin~1,FENG Song-lin~1,LI Sheng-yi~2 1.State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; 2.College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073, China
Numerical Simulation of μDMFC Performance ZHANG Bo,ZHANG Yu-feng,LIU Xiao-wei,QIAO Yu-hua,ZHANG Peng (MEMS Center Harbin Institute of Technology, Harbin 150001, China)
Effect of Anode Flow Pattern Design on the Performance of Micro Air-Breathing DMFC ZHONG Ling-yan,WANG Xiao-hong,JIANG Ying-qi,LIU Li-tian (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)
Preparation of Porous-Silicon-Based Electrocatalytic Electrodes for Micro Direct Methanol Fuel Cell LIU Xiao-wei,SUO Chun-guang,ZHANG Yu-feng,ZHANG Bo,HU Ze-xian (MEMS Center, Harbin Institute of Technology, Harbin 150001, China)
A High Overloaded Piezoresistive Accelerometer Based on SOI Materials with Cantilever Beam ZHAO Yu-long, ZHAO Li-bo, JIANG Zhuang-de (School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China)
A Dual-Axis Capacitive Micromechanical Accelerometer REN Jie , FAN Shang-chun (School of Instrument Science & Opto-electronics Engineering,Beihang University 100083,China)
Design and Virtual Fabrication Process of a New Kind of Capacitive Accelerometer JIN Tong,ZHAO Xin,TAN Yi-yong,SUN Guang-yi,LU Gui-zhang (Institute of Robotics and Information Automatics System,Nankai University,Tianjin 300071,China )
Study on the Effects of Machining Error on the Z-Axis Silicon Microgyroscope SHI Qin, QIU An-ping, SU Yan, ZHU Xin-hua (School of Mechanical Engineering, Nanjing University of Science & Technology, Nanjing 210094,China)
Design and Analysis of Damping in Multi-Ranged Piezoresistive Micro Accelerometer MAO Hai-yang, XIONG Ji-jun , ZHANG Wen-dong ,GUO Tao , XU Dong (National Kay Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China)
A Signal Process Circuit of Capacitive Micro-Accelerometer LIU Hai-tao,WEN Zhi-yu,WEN Zhong-quan (MEMS Center of ChongQing University Chongqing 400030,China)
Design of Force-Balance Accelerometer with Frame Structure CHEN Wei-ping , ZHAO Zhen-gang , LIU Xiao-wei , HAN Tian (MEMS Center, Harbin Institute of Technology, Harbin 150001 ,China)
The Design Of A Piezoresistive Three-Axis Accelerometer SUN Jian,ZHAO Yu-long , YUAN Guo-ying , JIANG Zhuang-de , XU Jing-bo (Institute of Precision Engineering ,Xi'an Jiaotong University, State Key Lab of Mechanical Manufacturing System, Xi'an 710049, China)
Research on Multi-Ranged Micro Accelerometer XIONG Ji-jun ,MAO Hai-yang ,ZHANG Wen-dong ,XU Dong ,GUO Tao (National Kay Laboratory for Electronic Measurement Technology, North University of China, Taiyuan Shanxi 030051, China)
Micro Leverage Design for Micromechanical Silicon Oscillating Accelerometer QIU An-ping~ 1* , SU Yan~1, SHI Qin~1, HUANG Li-bin~2 1.School of Mechanical Engineering, Nanjing University of Science & Technology, Nanjing 2100941,China; 2.Department of Instrument Science & Engineering of Southeast University, Nanjing 210096,China
Detection of the Output Signals of Micromachined Gas Inertial Sensor Based on Convection Heat Transfer ZHAO Yan ~ 1,3* , SU Yan~2 , WANG Qing~1 1.Department of Instrument Science and Technology,Southeast University,Nanjing 210096,China; 2.Institute of mechanical engineering,Nanjing University of Science and Technology,Nanjing 210094,China; 3. Nanjing Institute of Industry Technology,Nanjing 210046,China
Design and Simulation of A Three-Axis Micromachined Gyroscope TANG Qun , WANG Shou-rong (Department of Instrument Science and Engineering, Southeast University, Naniing 21009, China)
Research on the Application of the Time-Serial Analysis Based Kalman Filter in MEMS Gyroscope Random Drift Compensation LI Jie, ZHANG Wen-dong, LIU Jun National Key Laboratory for Electronic Measurement Technology, Department of Electronic Science and Technology, North University of China, Taiyuan 030051,china
Study of a Decoupled Z-Axis MEMS Gyroscope XIE Jian-bing, YUAN Wei-zheng, CHANG Hong-long (Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical System, Northwestern Polytechnical University, Xi'an 710072, China)
An Interface Circuit for Capacitive Vibratory Microgyroscopes JIANG Qing-hua,YUAN Wei-zheng,CHANG Hong-long (Micro&Nano System Laboratory, Northwestern Polytechnical University,Xi`an 710072 ,China)
On Improving the Accuracy of Micromachined Gyroscopes Based on Multi-Sensors Fusion ZHANG Peng,CHANG Hong-long ,YUAN Wei-zheng,HU Min (MEMS / NEMS Laboratory,Northwestern Polytechnical University,Xi'an 710072,China)
Study on the Circuit of Driving Loop Control for Micromachined Vibratory Gyroscope LI Qian,LI Xiao-ying,CHANG Hong-long,JIANG Qing-hua (Micro/Nano System Laboratory, Northwestern Polytechnic University, Xi'an 710072 ,China)
Micro-Accelerometer Utilizing Digital Control and PWM Electrostatic Servo Technique AN Kang~ 1* ,SU Yan~2 1.Southeast University, Instrument Science and Engineering Dept.Nangjing 210096,China; 2.Nanjing University of Technology and Engineering, Mechanical Engineering College,Nangjing 210094,China
A Signal Detecting Method for the Double Capacitive Output Micromachined Gyroscope MO Bing, LIU Xiao-wei, TAN Xiao-yun, YIN Liang, DING Xue-wei, TANG Jia-yu (MEMS Center, Harbin Institute of Technology, Harbin 150001, China)
Design of the Micromachined Gyroscope Interface ASIC LIU Xiao-wei, MO Bing, WANG Chao, TAN Xiao-yun, XU Xiao-wei, QI Xiang-kun (MEMS Center, Harbin Institute of Technology, Harbin 150001, China)
One Single Chip Micro Inertial Measurement Unit CHANG Hong-long~ 1* , JIANG Qing-hua~1, CUI Jin-qiang~1, LI Qian~1, YUAN Wei-zheng~1, YANG Fang~2 1. Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical System, Northwestern Polytechnical University, Xi'an 710072, China; 2. Institue of Microelectronics, Peking University,Beijing 100871,China
An Inertial Force Actuated Bistable Switch Supported by Four Cosine-Shaped Cantilever Beams CHEN Guang-yan, ZHENG Ying-bin, ZHAO Long, WU Rui (Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China)
A Charge Delta-Sigma Modulator for Differential-Capacitance Sensors WANG Zhan-fei,LI Zhi-hong (National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronecs, Peking University,Beijing 100871, China)
Study on the Dynamic Characteristics of An Active-Head Slider Using a PZT Cantilever DUAN Chuan-lin~1 , WANG Yu-juan~1, CHEN Yun-fei~ 1,2* 1.College of Mechanical Engineering, Southeast University, Nanjing 210096,China; 2.Key Laboratory of MEMS of China Educational Ministry, Southeast University, Nanjing 210096,China
Solution of the Pico Slider′s Air Bearing Pressure Using a Multigrid Control Volume Method Based Additive Correction RUAN Hai-lin~1, WANG Yu-juan~1, DUAN Chuan-lin~1, CHEN Yun-fei~ 1,2* 1 College of Mechanical Engineering, Southeast University, Nanjing 210096,China; 2 Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096,China
The Research of Testing and Calibration Technology Based on Micro-Mechanical Gyro YANG Jin-xian~ 1,2 ,YUAN Gan-nan~ 1* ,XU Liang-chen~ 1,2 (1.College of Automation,Harbin Engineering University,Harbin 150001 China;2.Harbin Jian-Cheng Group,Harbin 150030,China)
Frequency and Damping Characteristics of Micro-Machined Gyroscope Working at Atmospheric Pressure LIU Xiao-wei, CHEN Hong, CHEN Wei-ping , LU Xue-bin ,HAN Tian (MEMS Center, Harbin Institute of Technology, Harbin 150001, China)
Development and Analysis of Piezoelectric Micro-Machined Ultrasonic Transducers in Silicon Substrate HAO Zhen-hong,TANG Liang,QIAO Dong-hai,WANG Cheng-hao (Institute of Acoustics, Chinese Academy of Sciences,Beijing 100080,China)
Application of Microphone in Sound Collection System for Aircraft in Low Altitude ZHANG Chao-qian, LOU Wen-zhong, QIAO Jie (School of Mechartonic Engineering Beijing institute technology ,Beijing 100081, China )
Anti-Stiction Structure for Silicon Condenser Microphone PAN Xin, WANG Cheng-hao , XU Lian, WEI Jian-hui (Institute of Acoustics, Chinese Academy of Science, Beijing 100080, China)
Design of Vector Hydrophone Based on Resonant Tunnelling Diodes ZHANG Bin-zhen~ 1,2 ,XIE Bin~ 2* , XUE Chen-yang~2, ZHANG Wen-dong~2 ,CHEN Shang~2 1. School of Mechanic-Electronic,Beijing Institute of Technology,Beijing 100081,China; 2.Key Lab of Instrumentation Science & Dynamic Measurement(North University of China),Ministry of Education, Taiyuan 030051,China
Design and Analysis of Velocity Hydrophone with Co-Oscillating Sphere and Inner MEMS Accelerometers AN Peng,YUAN Wei-zheng,ZHANG Cheng-liang (Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an 710072, China)
Finite Element Emulation of A Capacitive Microfabricated Ultrasonic Transducer SONG Guang-de, GUAN Zhi-jian, LI Da-chao (National Precision Measuring & Testing Technique and Instruments Key Lab, Tianjin University, Tianjin 300072,China)
Research of Cantilever Acoustic Sensor Based on Resonant Tunneling Diode ZHANG Wen-dong, WANG Jian, XUE Chen-yang, XIONG Ji-jun, ZHANG Bin-zhen, TONG Zhao-min (National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan Shanxi 030051,China)
Silicon Condenser Microphone with Round Membranes TIAN Jing, WANG Cheng-hao,XU Lian,QIAO Dong-hai, MA Jun,HAO Zhen-hong,WEI Jian-hui (Institute of Acoustics, Chinese Academy of Sciences, Beijing 100080,China)
Design of a Bionic Vector Hydrophone Based on Silicon XIE Bin, XUE Chen-yang, ZHANG Wen-dong, XIONG Ji-jun, ZHANG Bin-zhen , CHEN Shang (National Key Laboratory For Electronic Measurement Technology,North University of China, Taiyuan 030051, China)
Nano-Al Film Surface and Electrical Resistivity Characterized by Fractal FU Yong-zhong,DING Jian-ning,XIE Guo-xin,YANG Ji-chang (Micro/Nano Science & Technology Center,Jiangsu University,Zhenjiang Jiangsu 212013,China)
Hydrothermal Synthesis LiNbO_3 Nanopowders and Dielectric Properties of Their Sinters CHEN Zhe-ning,CHENG Shi-jing~1,LIU Xin-rong (Department of Applied Chemistry; Harbin Institute of Technology , Harbin 150001,China)
Electrochemistry Anodic Oxidation Self-Assembled TiO_2 Nanotube Arrays TIAN Tian, XIAO Xiu-feng, LIU Rong-fang (College of Chemistry and Material Science Fujian Normal University,Fuzhou 350007,China)
Preparation and Study on Dispersion of Hydro-Based Nanosized TiO_2 Suspension LIN Ben-lan, SHEN Xiao-dong, CUI Sheng (College of Material Science and Technology, Nanjing University of Technology, 210009 Nanjing)
Synthesis and Property of SnO_2 Nanorods Doped Cd~(2+) ZHAO He-yun~ 1,3* ,LI Yuo-huan~2,WU Xing-hui~1 1.Department of Materials Science and Engineering, Yunnan University,Kunming 650091,China; 2.Life Science and Chemistry School of Danli College, Yunna Danli 671200,China; 3.Materials and Metallurgy Engineering College, Kunming University of Science and Technology, Kunming 650093,China
XPS Analysis on Grafting Modification of Fe_3O_4 Nanopowders CUI Sheng, SHEN Xiao-dong, LIN Ben-lan, XU Na (College of Material Science and Technology, Nanjing University of Technology,Nanjing 210009,China)
Synthesis and Characterization of Antimony-Doped Tin Oxide Nanopowders YANG Fen , ZHANG Xue-jun,GAN Fu-xing 1.School of Resource & Environmental Science, Wuhan University, Wuhan 430072,China; 2.Guizhou Province Key Laboratory of the Ferment Engineering & Biological Pharmacy, Guizhou University of Technology, Guiyang 550003, China
A Rapid and Simple Route to Synthesizing ZnO Nanorods by Using Microwave Irradiation KONG Xiang-rong, QIU Chen,LIU Qiang,LIU Lin,ZHENG Wen-jun (Department of Materials, College of Chemistry, Nankai University, Tianjin 300071, China)
Microstructure of Cu-Based Function Nanocomposite Material LOU Bai-yang, ZHOU Yu-bang, XU Bin YANG Yu-jun Institute of Materials and Surface Engineering, The MOE Key Laboratory of Mechanical Manufacture and Automation, Zhejiang University of Technology, Hangzhou 310023, China
Effect of Preparation and Activation Condition of Catalyst on Growth of CNTs TANG Chang-xing~1 , QU Mei-hen~2, YU Zuo-long~2 1.Institute of Chemical Material, China Academy of Engineering Physics,Mianyang Sichuan 621900,China; 2.Chengdu Institute of Organic Chemistry, Chinese Academy of Sciences, Chengdu 610041,China)
Electrophoresis Deposition of Carbon Nanotubes in MEMS Structures and Their Field Emission Characteristics GUO Lin-rui,CHEN Feng,YE Xiong-ying,LIU Li-tao,WU Kang,ZHOU Zhao-ying State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments & Mechanology, Tsinghua University, Beijing 100084, China
Design and Fabrication of Low-Numerical-Aperture Amplitude-Photon Sieve CHENG Guan-xiao~ 1,2 , XING Ting-wen~ 1* , LIN Wu-mei~1, ZHOU Jin-mei~1, QIU Chuan-kai~1, LIAO Zhi-jie~ 1,2 , MA Jian-ling~3 1.State Key Lab of Optical Technologies for Microfabrication, the Institute of Optics and Electronics, the Chinese Academy of Sciences, Chengdu 610209,China; 2.Graduate School of the Chinese Academy of Sciences, Beijing 100039, China; 3.Department of Physics and Electronics, Taishan College, Taian Shandong 271021, China
Synthesis Isolated Short Carbon Nanotubes by Simple One-Step Catalytic Pyrolysis Process GONG Qiao-juan,LI He-jun,WANG Xiang,LI Ke-zhi (College of Materials, Northwest Polytechnical University, Xi'an 710072, China)
Characterization and Condition of Synthesizing CuAl_2O_4 Nanoparticles SUI Xiao-tao~1,YU Qiao~1, JIANG Yan-yan~ 1,2* , TANG Nai-ling~1,GU Xiu-mei~1,NING Gui-ling~2 1. College of Chemical Technology and Material Science and Technology,Dalian Institute of Light Industry, Dalian Liaoning 116034,China; 2. State Key Laboratory of Fine Chemical Industries of Dalian University of Technology, Micro/Nano Key Laboratory of Liaoning Province, Dalian Liaoning 116012,China
Controllable Synthesis of Nano-Sized TiO_2 with PEG and Its Photocatalytic Activity BAO Nan~ 1* , SUN Jian~1, XIE Qing~2, MA Zhi-hui~1 1. School of Environmental Science and Engineering, Shandong University, Ji'nan 250100, China; 2. School of Environmental and Biological Science and Technology, Dalian University of Technology, Dalian 116024, China
Thermal Insulation of Porous Silicon under the Influence of the Micro Structural Parameter HU Ming, ZHANG Wei, ZHANG Xu-rui, YANG Hai-bo (School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China)
Preparation of WO_3 Nano-Powder with Microemulsion Methed DIAO Xian-zhen, HOU Chang-jun (Chemistry and Chemical Engineering Department, Chongqing University, Chongqing 400030,China)
Fabricating of Nanometer Powders for Nd:YAG Ceramic Laser Materials WAN Yan-fen, CAO Quan-xi, LI Shuang-chun, LI Zhen, SU Dong-jie (Department of material science and engineering,School of Technical Physics, Xidian University, Xi'an 710071,China)
Characterization of Nanosized SnO_2 by Transmission Electron Microscope HUANG Shi-zhen~ 1,2* , CHEN Wen-zhe~3,LIN wei~ 1,2 1.Institute of gas sensor, Fuzhou University, Fuzhou 350002,China; 2.Fujian key laboratory of microelectronic &integrate circuits, Fuzhou 350002,China; 3.department of material, Fuzhou University, Fuzhou 350002,China
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