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A study on the influence of gas physical properties on near-field acoustic levitation characteristics

LI Ronghe;SANG Hande;CHEN Shuang;ZHAO Su;WANG Zhihui;CHEN Jiangtao;LUO Yongsheng;School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology;Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sciences;  
In the process of using near-field acoustic levitation technology to transport wafers, in order to improve the near-field acoustic levitation force, this paper studies the relationship between near-field acoustic levitation force and gas physical properties. The theory of acoustic radiation and fluid dynamics are adopted to model the levitation force in different gas media. An experimental setup for measuring the levitation force in different gas environments was developed. The averaged levitation force measured in Helium is 24.8% higher than that of in air. The influence of gas density, specific heat ratio, sound velocity and viscosity on the levitation force is analyzed. It is found that the specific heat ratio is the dominant parameter that influences the nearfield acoustic levitation force. This method provides reference value for the environmental applicability of wafer handling
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