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Surfiace Roughness Interferogram Processing System

Chen Xiaomei; Ren Dongmei; Li Zhijun  
This paper introduces surface roughness interferogram processing system and how to use it to measure surface roughness by computer based image processing technology. The system can measure Ra ≤ 0. 2 μm multi -gloove specimen and testing surface by processing a white light interferogram, and measure H≤5 μm step height by processing a white interferogram and sodium light interfrogram, former for height measurement and later CCD calibration with the advantages of absolution, non -contact, high speed and automation .
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