Surfiace Roughness Interferogram Processing System
Chen Xiaomei; Ren Dongmei; Li Zhijun
This paper introduces surface roughness interferogram processing system and how to use it to measure surface roughness by computer based image processing technology. The system can measure Ra ≤ 0. 2 μm multi -gloove specimen and testing surface by processing a white light interferogram, and measure H≤5 μm step height by processing a white interferogram and sodium light interfrogram, former for height measurement and later CCD calibration with the advantages of absolution, non -contact, high speed and automation .